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- W2243728224 abstract "In solution growth of 4H-SiC, we have investigated changes in macrostep height with addition of the Group III (B, Al, Ga), Group IV (Ge, Sn), Group V (N) elements, and transition metals (Ti, V, Cr, Ni) to Si solvents, in order to find additives improving severe step bunching which often occurs during growth. The addition of Al, B, Sn, N, and V decreased the average macrostep height compared with the crystal grown with Si solvents. The addition of Al, B, Sn, N, and V suppressed the generation of trench-shaped surface defects in long-term growth of 10 hours. This result demonstrated that the addition of Al, B, Sn, N, and V has an advantage to achieve high quality bulk crystal growth from solution." @default.
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- W2243728224 date "2015-06-01" @default.
- W2243728224 modified "2023-10-14" @default.
- W2243728224 title "Change in Surface Morphology by Addition of Impurity Elements in 4H-SiC Solution Growth with Si Solvent" @default.
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- W2243728224 doi "https://doi.org/10.4028/www.scientific.net/msf.821-823.14" @default.
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