Matches in SemOpenAlex for { <https://semopenalex.org/work/W2244014050> ?p ?o ?g. }
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- W2244014050 endingPage "923" @default.
- W2244014050 startingPage "879" @default.
- W2244014050 abstract "This chapter discusses the differences between the heritage microcircuit packaging world and the still evolving MEMS packaging arena. Materials used in the packaging of MEMs are reviewed and their respective applications. The packaging schemes for these devices owe their infrastructure base to the body of knowledge surrounding semiconductors and microcircuits. MEMS devices yield new complexities which drive new packaging solutions. As opposed to traditional microcircuit chips, MEMS often include moving structures along with the need to have contact with the external environment, driving the requirements for packaging such components. Thus, some functions include interaction with the surrounding environment, such as pressure sensors. This imposes new requisites on packaging, since in regular microelectronics the chip must be protected completely from any impact from the environment. Packaging also provides mechanical support to the sensitive chip, facilitating the handling of the chip, and simplifying assembly. This chapter emphasizes the materials involved in packaging MEMS devices and the addresses the challenges involved. Included in this chapter are several case studies demonstrating novel packaging/material solutions." @default.
- W2244014050 created "2016-06-24" @default.
- W2244014050 creator A5009554975 @default.
- W2244014050 creator A5058179998 @default.
- W2244014050 date "2011-01-01" @default.
- W2244014050 modified "2023-09-27" @default.
- W2244014050 title "MEMS Packaging Materials" @default.
- W2244014050 cites W1963639018 @default.
- W2244014050 cites W2009053831 @default.
- W2244014050 cites W2029609207 @default.
- W2244014050 cites W2032194147 @default.
- W2244014050 cites W2042740446 @default.
- W2244014050 cites W2060603102 @default.
- W2244014050 cites W2061103674 @default.
- W2244014050 cites W2106879840 @default.
- W2244014050 cites W2108918332 @default.
- W2244014050 cites W2113753045 @default.
- W2244014050 cites W2119743267 @default.
- W2244014050 cites W2125531484 @default.
- W2244014050 cites W2130113088 @default.
- W2244014050 cites W2136796927 @default.
- W2244014050 cites W2144562200 @default.
- W2244014050 cites W2146020092 @default.
- W2244014050 cites W2146685969 @default.
- W2244014050 cites W2162465083 @default.
- W2244014050 cites W2162869577 @default.
- W2244014050 cites W2491005113 @default.
- W2244014050 cites W2543924470 @default.
- W2244014050 cites W4244213501 @default.
- W2244014050 doi "https://doi.org/10.1007/978-0-387-47318-5_12" @default.
- W2244014050 hasPublicationYear "2011" @default.
- W2244014050 type Work @default.
- W2244014050 sameAs 2244014050 @default.
- W2244014050 citedByCount "5" @default.
- W2244014050 countsByYear W22440140502012 @default.
- W2244014050 countsByYear W22440140502013 @default.
- W2244014050 countsByYear W22440140502016 @default.
- W2244014050 countsByYear W22440140502020 @default.
- W2244014050 crossrefType "book-chapter" @default.
- W2244014050 hasAuthorship W2244014050A5009554975 @default.
- W2244014050 hasAuthorship W2244014050A5058179998 @default.
- W2244014050 hasConcept C119599485 @default.
- W2244014050 hasConcept C127413603 @default.
- W2244014050 hasConcept C165005293 @default.
- W2244014050 hasConcept C171250308 @default.
- W2244014050 hasConcept C187937830 @default.
- W2244014050 hasConcept C192562407 @default.
- W2244014050 hasConcept C193149544 @default.
- W2244014050 hasConcept C37977207 @default.
- W2244014050 hasConcept C69567186 @default.
- W2244014050 hasConcept C78519656 @default.
- W2244014050 hasConceptScore W2244014050C119599485 @default.
- W2244014050 hasConceptScore W2244014050C127413603 @default.
- W2244014050 hasConceptScore W2244014050C165005293 @default.
- W2244014050 hasConceptScore W2244014050C171250308 @default.
- W2244014050 hasConceptScore W2244014050C187937830 @default.
- W2244014050 hasConceptScore W2244014050C192562407 @default.
- W2244014050 hasConceptScore W2244014050C193149544 @default.
- W2244014050 hasConceptScore W2244014050C37977207 @default.
- W2244014050 hasConceptScore W2244014050C69567186 @default.
- W2244014050 hasConceptScore W2244014050C78519656 @default.
- W2244014050 hasLocation W22440140501 @default.
- W2244014050 hasOpenAccess W2244014050 @default.
- W2244014050 hasPrimaryLocation W22440140501 @default.
- W2244014050 hasRelatedWork W1974469947 @default.
- W2244014050 hasRelatedWork W2112464872 @default.
- W2244014050 hasRelatedWork W2153004553 @default.
- W2244014050 hasRelatedWork W2170773312 @default.
- W2244014050 hasRelatedWork W2244014050 @default.
- W2244014050 hasRelatedWork W2372393362 @default.
- W2244014050 hasRelatedWork W2378753421 @default.
- W2244014050 hasRelatedWork W2379492783 @default.
- W2244014050 hasRelatedWork W2899084033 @default.
- W2244014050 hasRelatedWork W2472081336 @default.
- W2244014050 isParatext "false" @default.
- W2244014050 isRetracted "false" @default.
- W2244014050 magId "2244014050" @default.
- W2244014050 workType "book-chapter" @default.