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- W2244836824 abstract "A Schwarzschild imaging system has been designed to achieve 0.1 {mu}m resolution in a 0.4 mm diameter field of view when operated at a center wavelength of 13.4 nm. A decentered aperture is located on the convex primary resulting in an unobstructed numerical aperture of 0.08 and a corresponding depth of field of {plus_minus} 1 {mu}m. The Schwarzschild imaging objective is part of a five-reflection system containing the laser plasma source (LPS), condensing optics, turning mirror and reflection mask as shown in Figure 1. Extreme ultraviolet (EUV) radiation is generated by impinging a laser beam onto a copper target. The plasma source is driven by a Lambda Physik PLX 250 KrF excimer laser emitting 0.6 Joule, 20 ns pulses at a 200 Hz maximum repetition rate. Measurements of the source indicate that the full-width-half-maximum diameter is less than 100 {mu}m." @default.
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- W2244836824 date "1994-08-01" @default.
- W2244836824 modified "2023-09-24" @default.
- W2244836824 title "10{times} reduction imaging at 13.4nm" @default.
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