Matches in SemOpenAlex for { <https://semopenalex.org/work/W2245171030> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2245171030 endingPage "140" @default.
- W2245171030 startingPage "135" @default.
- W2245171030 abstract "Rapid thermal annealing (RTA) of Czochralski silicon wafers at around 1260°C installs a depth profile of some vacancy species. Subsequent oxygen precipitation in such wafers is vacancy-assisted. The data on RTA-installed vacancy profiles - and the corresponding precipitate density profiles - suggest that there is a slow-diffusing vacancy species (V s ) along with two fast-diffusing species: a Watkins vacancy (V w ) manifested in irradiation experiments and fast vacancy (V f ) responsible for the high- T vacancy contribution into self-diffusion. The V s species are lost during cooling stage of RTA, and the loss seems to occur by conversion of V s into V f followed by a quick out-diffusion of V f . A model based on this scenario provides a good fit to the reported profiles of oxide precipitate density in RTA wafers for different values of T RTA and different cooling rates." @default.
- W2245171030 created "2016-06-24" @default.
- W2245171030 creator A5032353509 @default.
- W2245171030 creator A5072591299 @default.
- W2245171030 date "2015-10-01" @default.
- W2245171030 modified "2023-09-23" @default.
- W2245171030 title "Vacancy Species Produced by Rapid Thermal Annealing of Silicon Wafers" @default.
- W2245171030 cites W1967693140 @default.
- W2245171030 cites W1967772839 @default.
- W2245171030 cites W1971278610 @default.
- W2245171030 cites W1990277518 @default.
- W2245171030 cites W2003186928 @default.
- W2245171030 cites W2011691956 @default.
- W2245171030 cites W2016659220 @default.
- W2245171030 cites W2035191723 @default.
- W2245171030 cites W2035709483 @default.
- W2245171030 cites W2036427913 @default.
- W2245171030 cites W2040607498 @default.
- W2245171030 cites W2041165551 @default.
- W2245171030 cites W2048653231 @default.
- W2245171030 cites W2050192646 @default.
- W2245171030 cites W2063308851 @default.
- W2245171030 cites W2072379895 @default.
- W2245171030 cites W2072585943 @default.
- W2245171030 cites W2099084623 @default.
- W2245171030 cites W2101416353 @default.
- W2245171030 doi "https://doi.org/10.4028/www.scientific.net/ssp.242.135" @default.
- W2245171030 hasPublicationYear "2015" @default.
- W2245171030 type Work @default.
- W2245171030 sameAs 2245171030 @default.
- W2245171030 citedByCount "2" @default.
- W2245171030 countsByYear W22451710302017 @default.
- W2245171030 countsByYear W22451710302019 @default.
- W2245171030 crossrefType "journal-article" @default.
- W2245171030 hasAuthorship W2245171030A5032353509 @default.
- W2245171030 hasAuthorship W2245171030A5072591299 @default.
- W2245171030 hasConcept C107054158 @default.
- W2245171030 hasConcept C113196181 @default.
- W2245171030 hasConcept C114221277 @default.
- W2245171030 hasConcept C121332964 @default.
- W2245171030 hasConcept C153294291 @default.
- W2245171030 hasConcept C160671074 @default.
- W2245171030 hasConcept C171250308 @default.
- W2245171030 hasConcept C185592680 @default.
- W2245171030 hasConcept C191897082 @default.
- W2245171030 hasConcept C192562407 @default.
- W2245171030 hasConcept C204530211 @default.
- W2245171030 hasConcept C2777855556 @default.
- W2245171030 hasConcept C43617362 @default.
- W2245171030 hasConcept C544956773 @default.
- W2245171030 hasConcept C69357855 @default.
- W2245171030 hasConcept C8010536 @default.
- W2245171030 hasConcept C97355855 @default.
- W2245171030 hasConceptScore W2245171030C107054158 @default.
- W2245171030 hasConceptScore W2245171030C113196181 @default.
- W2245171030 hasConceptScore W2245171030C114221277 @default.
- W2245171030 hasConceptScore W2245171030C121332964 @default.
- W2245171030 hasConceptScore W2245171030C153294291 @default.
- W2245171030 hasConceptScore W2245171030C160671074 @default.
- W2245171030 hasConceptScore W2245171030C171250308 @default.
- W2245171030 hasConceptScore W2245171030C185592680 @default.
- W2245171030 hasConceptScore W2245171030C191897082 @default.
- W2245171030 hasConceptScore W2245171030C192562407 @default.
- W2245171030 hasConceptScore W2245171030C204530211 @default.
- W2245171030 hasConceptScore W2245171030C2777855556 @default.
- W2245171030 hasConceptScore W2245171030C43617362 @default.
- W2245171030 hasConceptScore W2245171030C544956773 @default.
- W2245171030 hasConceptScore W2245171030C69357855 @default.
- W2245171030 hasConceptScore W2245171030C8010536 @default.
- W2245171030 hasConceptScore W2245171030C97355855 @default.
- W2245171030 hasLocation W22451710301 @default.
- W2245171030 hasOpenAccess W2245171030 @default.
- W2245171030 hasPrimaryLocation W22451710301 @default.
- W2245171030 hasRelatedWork W1680422288 @default.
- W2245171030 hasRelatedWork W1980509651 @default.
- W2245171030 hasRelatedWork W2003733153 @default.
- W2245171030 hasRelatedWork W2032710614 @default.
- W2245171030 hasRelatedWork W2035538711 @default.
- W2245171030 hasRelatedWork W2042925312 @default.
- W2245171030 hasRelatedWork W2070201262 @default.
- W2245171030 hasRelatedWork W4205510562 @default.
- W2245171030 hasRelatedWork W2004589289 @default.
- W2245171030 hasRelatedWork W2149642111 @default.
- W2245171030 hasVolume "242" @default.
- W2245171030 isParatext "false" @default.
- W2245171030 isRetracted "false" @default.
- W2245171030 magId "2245171030" @default.
- W2245171030 workType "article" @default.