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- W2245429661 abstract "We have patterned polymethyl methacrylate (PMMA) resist by exposing it to the fifth harmonic (213?nm) of an Nd:YAG source through metalized apertures in contact with the resist. Interference patterns with both near-?and far-field origins were observed. In order to test the contrast and uniformity of exposure, we deposited germanium onto developed areas to form arrays with feature sizes of ~200?nm. We present a straightforward model for interference effects generated in our process, and discuss opportunities for direct-write lithography through single apertures." @default.
- W2245429661 created "2016-06-24" @default.
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- W2245429661 date "2008-03-12" @default.
- W2245429661 modified "2023-09-26" @default.
- W2245429661 title "Deep UV Pattern Definition in PMMA" @default.
- W2245429661 hasPublicationYear "2008" @default.
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