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- W2246130378 abstract "Aluminum-doped Zinc Oxide (AZO) is considered as an excellent candidate to replace Indium Tin Oxide (ITO), which is widely used as transparent conductive oxide (TCO) for electronic devices such as liquid crystal displays (LCDs), organic light emitting diodes (OLEDs) and organic solar cells (OSCs). In the present study, AZO thin film was applied to the transparent electrode of a channel-shaped flexible organic solar cell using a low-temperature selective-area atomic layer deposition (ALD) process. AZO thin films were deposited on Poly-Ethylene-Naphthalate (PEN) substrates with Di-Ethyl-Zinc (DEZ) and Tri-Methyl-Aluminum (TMA) as precursors and H₂O as an oxidant for the atomic layer deposition at the deposition temperature of 130?C. The pulse time of TMA, DEZ and H₂O, and purge time were 0.1 second and 20 second, respectively. The electrical and optical properties of the AZO films were characterized as a function of film thickness. The 300 nm-thick AZO film grown on a PEN substrate exhibited sheet resistance of 87{Omega}/square and optical transmittance of 84.3% at a wavelength between 400 and 800 nm." @default.
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- W2246130378 date "2011-05-01" @default.
- W2246130378 modified "2023-09-28" @default.
- W2246130378 title "Fabrication of a Transparent Electrode for a Flexible Organic Solar Cell in Atomic Layer Deposition" @default.
- W2246130378 hasPublicationYear "2011" @default.
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