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• W2246249166 abstract "Titanium dioxide (TiO 2 ) nanothin films were deposited on unheated substrate, the glass slide and Si-wafer, by DC reactive magnetron sputtering with different substrate-target distance ( d st ), in range of 8 to 14 cm. The structural, surface morphology and transmittance spectrum of TiO 2 thin films were characterized by grazing-incidence X-ray diffraction (GI-XRD), atomic force microscopy (AFM) and spectrophotometer, respectively. XRD results show that as-deposited TiO 2 films with short substrate-target distance have only anatase crystal structure corresponding to the anatase in (101) and (200) plane, and turn to be amorphous with long substrate-target distance. The thickness and roughness varied from 50 nm to 142 nm and 1.6 nm to 3.5 nm, respectively. The as-deposited TiO 2 films exhibited high visible transmittance. The optical constants of the films, refractive index ( n ) and extinction coefficient ( k ), were calculated by Swanepoel method, at 550 nm, was about 2.43 - 2.76 and 0.082 - 0.187, respectively. The energy band gap ( E g ) of the as-deposited TiO 2 films in the range of 3.20 - 3.25 was observed." @default.
• W2246249166 created "2016-06-24" @default.
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• W2246249166 date "2014-06-01" @default.
• W2246249166 modified "2023-09-26" @default.
• W2246249166 title "Structural and Optical Properties of Anatase-TiO₂ Sputtered Nano-Thin Films" @default.
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• W2246249166 doi "https://doi.org/10.4028/www.scientific.net/amr.979.370" @default.
• W2246249166 hasPublicationYear "2014" @default.
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