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- W2247359511 abstract "A new approach based on three-dimensional tip electrodes has been developed as a way to increase the electrical oupling between the neural cells and the individual sensors in a microelectrode array (MEA). With respect to standard planar electrodes, the electrical coupling between an electrode and a neural cell is improved as benefit of an increased cell-electrode contact area. Thus using a custom fab-rication process, three-dimensional MEAs exhibiting a higher spatial resolution than classical inte-grated MEA systems have been manufactured on a silicon wafer. These MEAs have an electrode di-ameter of 3-4 um, a height of 1.75 um, and a pitch dimension of 5-6 um. In-vitro electrical measure-ments and electrophysiological experiments using standard planar electrodes as well as the proposed three-dimension electrodes are currently performed." @default.
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- W2247359511 date "2008-01-01" @default.
- W2247359511 modified "2023-09-26" @default.
- W2247359511 title "Three-Dimensional Silicon-based MEA with High Spatial Resolution" @default.
- W2247359511 hasPublicationYear "2008" @default.
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