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- W2247392403 abstract "Mass spectral overlaps in atom probe tomography (APT) analyses of complex compounds typically limit the identification of elements and microstructural analysis of a material. This study concerns the TiSiN system, chosen because of severe mass-to-charge-state ratio overlaps of the 14N+ and 28Si2+ peaks as well as the 14N2+ and 28Si+ peaks. By substituting 14N with 15N, mass spectrum peaks generated by ions composed of one or more N atoms will be shifted toward higher mass-to-charge-state ratios, thereby enabling the separation of N from the predominant Si isotope. We thus resolve thermodynamically driven Si segregation on the nanometer scale in cubic phase Ti1-xSix15N thin films for Si contents 0.08 ≤ x ≤ 0.19 by APT, as corroborated by transmission electron microscopy. The APT analysis yields a composition determination that is in good agreement with energy dispersive X-ray spectroscopy and elastic recoil detection analyses. Additionally, a method for determining good voxel sizes for visualizing small-scale fluctuations is presented and demonstrated for the TiSiN system." @default.
- W2247392403 created "2016-06-24" @default.
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- W2247392403 date "2018-01-01" @default.
- W2247392403 modified "2023-10-16" @default.
- W2247392403 title "Resolving mass spectral overlaps in atom probe tomography by isotopic substitutions – case of TiSi15N" @default.
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- W2247392403 doi "https://doi.org/10.1016/j.ultramic.2017.08.004" @default.
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