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- W2247398464 endingPage "579" @default.
- W2247398464 startingPage "575" @default.
- W2247398464 abstract "This paper reports the analysis of the composition, structure and phase of the re-deposition material that was generated from the reaction from CF 4 plasma etching on the Al 2 O 3 -TiC substrate. The re-deposition was sputtered from the etching area and deposited on a silicon coupon for analysis. The morphology of the re-deposition was investigated by scanning electron microscope (SEM) and the composite element of the re-deposition was detected by using energy dispersive x-ray spectroscopy (SEM-EDX). X-ray diffraction (XRD) was used to analyse the structure and phase of the re-deposition. The results show that the prepared re-deposition was composed of F and Al atoms, with 51.24 At% and 27.67 At%, respectively. XRD revealed that this was owing to the chemical formula AlF 3 , which has a rhombohedral crystal structure in the most stable alpha phase (α-AlF 3 )." @default.
- W2247398464 created "2016-06-24" @default.
- W2247398464 creator A5068122457 @default.
- W2247398464 date "2015-08-01" @default.
- W2247398464 modified "2023-09-25" @default.
- W2247398464 title "An XRD Phase Analysis of Al-F Re-Deposition Produced from Reactive Ion Etching" @default.
- W2247398464 cites W2005661296 @default.
- W2247398464 cites W2016253804 @default.
- W2247398464 cites W2024804448 @default.
- W2247398464 cites W2070058744 @default.
- W2247398464 cites W2070860545 @default.
- W2247398464 cites W2080949063 @default.
- W2247398464 cites W2154877750 @default.
- W2247398464 doi "https://doi.org/10.4028/www.scientific.net/kem.659.575" @default.
- W2247398464 hasPublicationYear "2015" @default.
- W2247398464 type Work @default.
- W2247398464 sameAs 2247398464 @default.
- W2247398464 citedByCount "1" @default.
- W2247398464 countsByYear W22473984642022 @default.
- W2247398464 crossrefType "journal-article" @default.
- W2247398464 hasAuthorship W2247398464A5068122457 @default.
- W2247398464 hasConcept C100460472 @default.
- W2247398464 hasConcept C111368507 @default.
- W2247398464 hasConcept C113196181 @default.
- W2247398464 hasConcept C127313418 @default.
- W2247398464 hasConcept C147438087 @default.
- W2247398464 hasConcept C151730666 @default.
- W2247398464 hasConcept C159985019 @default.
- W2247398464 hasConcept C171250308 @default.
- W2247398464 hasConcept C178790620 @default.
- W2247398464 hasConcept C185592680 @default.
- W2247398464 hasConcept C191897082 @default.
- W2247398464 hasConcept C192562407 @default.
- W2247398464 hasConcept C26771246 @default.
- W2247398464 hasConcept C2777289219 @default.
- W2247398464 hasConcept C2779227376 @default.
- W2247398464 hasConcept C2816523 @default.
- W2247398464 hasConcept C43617362 @default.
- W2247398464 hasConcept C44280652 @default.
- W2247398464 hasConcept C544956773 @default.
- W2247398464 hasConcept C64297162 @default.
- W2247398464 hasConcept C86803240 @default.
- W2247398464 hasConceptScore W2247398464C100460472 @default.
- W2247398464 hasConceptScore W2247398464C111368507 @default.
- W2247398464 hasConceptScore W2247398464C113196181 @default.
- W2247398464 hasConceptScore W2247398464C127313418 @default.
- W2247398464 hasConceptScore W2247398464C147438087 @default.
- W2247398464 hasConceptScore W2247398464C151730666 @default.
- W2247398464 hasConceptScore W2247398464C159985019 @default.
- W2247398464 hasConceptScore W2247398464C171250308 @default.
- W2247398464 hasConceptScore W2247398464C178790620 @default.
- W2247398464 hasConceptScore W2247398464C185592680 @default.
- W2247398464 hasConceptScore W2247398464C191897082 @default.
- W2247398464 hasConceptScore W2247398464C192562407 @default.
- W2247398464 hasConceptScore W2247398464C26771246 @default.
- W2247398464 hasConceptScore W2247398464C2777289219 @default.
- W2247398464 hasConceptScore W2247398464C2779227376 @default.
- W2247398464 hasConceptScore W2247398464C2816523 @default.
- W2247398464 hasConceptScore W2247398464C43617362 @default.
- W2247398464 hasConceptScore W2247398464C44280652 @default.
- W2247398464 hasConceptScore W2247398464C544956773 @default.
- W2247398464 hasConceptScore W2247398464C64297162 @default.
- W2247398464 hasConceptScore W2247398464C86803240 @default.
- W2247398464 hasLocation W22473984641 @default.
- W2247398464 hasOpenAccess W2247398464 @default.
- W2247398464 hasPrimaryLocation W22473984641 @default.
- W2247398464 hasRelatedWork W2013557620 @default.
- W2247398464 hasRelatedWork W2029845838 @default.
- W2247398464 hasRelatedWork W2030167524 @default.
- W2247398464 hasRelatedWork W2043901341 @default.
- W2247398464 hasRelatedWork W2062028387 @default.
- W2247398464 hasRelatedWork W2066394599 @default.
- W2247398464 hasRelatedWork W2091210967 @default.
- W2247398464 hasRelatedWork W2136922255 @default.
- W2247398464 hasRelatedWork W2169046083 @default.
- W2247398464 hasRelatedWork W2371338989 @default.
- W2247398464 hasVolume "659" @default.
- W2247398464 isParatext "false" @default.
- W2247398464 isRetracted "false" @default.
- W2247398464 magId "2247398464" @default.
- W2247398464 workType "article" @default.