Matches in SemOpenAlex for { <https://semopenalex.org/work/W2247488315> ?p ?o ?g. }
- W2247488315 endingPage "H63" @default.
- W2247488315 startingPage "H63" @default.
- W2247488315 abstract "The effects of passivation, formed by atomic layer deposition (ALD) at the interface of , were investigated by high resolution transmission electron microscopy, X-ray photoelectron spectroscopy, and capacitance–voltage measurements. The results indicate that the incorporation of Ga by diffusion into the layer is reduced by the passivation at the interface. The Ga and As contents of the films decreased with increasing amount of interfacial passivation, while the capacitance value decreased. The phase optimized at five ALD cycles effectively suppressed the formation of interfacial oxide and subsequently improved the electrical properties." @default.
- W2247488315 created "2016-06-24" @default.
- W2247488315 creator A5013354479 @default.
- W2247488315 creator A5041366734 @default.
- W2247488315 creator A5055727484 @default.
- W2247488315 creator A5070684107 @default.
- W2247488315 creator A5082030425 @default.
- W2247488315 creator A5087475048 @default.
- W2247488315 date "2011-01-01" @default.
- W2247488315 modified "2023-09-27" @default.
- W2247488315 title "Effects of Interface Al[sub 2]O[sub 3] Passivation Layer for High-k HfO[sub 2] on GaAs" @default.
- W2247488315 cites W1507601109 @default.
- W2247488315 cites W1624907158 @default.
- W2247488315 cites W1637994332 @default.
- W2247488315 cites W1638132286 @default.
- W2247488315 cites W1972753891 @default.
- W2247488315 cites W1980725144 @default.
- W2247488315 cites W1996366761 @default.
- W2247488315 cites W2002499938 @default.
- W2247488315 cites W2012804698 @default.
- W2247488315 cites W2021454104 @default.
- W2247488315 cites W2028718137 @default.
- W2247488315 cites W2056421566 @default.
- W2247488315 cites W2072298804 @default.
- W2247488315 cites W2091851257 @default.
- W2247488315 cites W2095579985 @default.
- W2247488315 cites W2305185437 @default.
- W2247488315 doi "https://doi.org/10.1149/1.3516615" @default.
- W2247488315 hasPublicationYear "2011" @default.
- W2247488315 type Work @default.
- W2247488315 sameAs 2247488315 @default.
- W2247488315 citedByCount "12" @default.
- W2247488315 countsByYear W22474883152012 @default.
- W2247488315 countsByYear W22474883152013 @default.
- W2247488315 countsByYear W22474883152014 @default.
- W2247488315 countsByYear W22474883152015 @default.
- W2247488315 countsByYear W22474883152016 @default.
- W2247488315 countsByYear W22474883152017 @default.
- W2247488315 countsByYear W22474883152019 @default.
- W2247488315 countsByYear W22474883152021 @default.
- W2247488315 crossrefType "journal-article" @default.
- W2247488315 hasAuthorship W2247488315A5013354479 @default.
- W2247488315 hasAuthorship W2247488315A5041366734 @default.
- W2247488315 hasAuthorship W2247488315A5055727484 @default.
- W2247488315 hasAuthorship W2247488315A5070684107 @default.
- W2247488315 hasAuthorship W2247488315A5082030425 @default.
- W2247488315 hasAuthorship W2247488315A5087475048 @default.
- W2247488315 hasConcept C113196181 @default.
- W2247488315 hasConcept C121332964 @default.
- W2247488315 hasConcept C127413603 @default.
- W2247488315 hasConcept C146088050 @default.
- W2247488315 hasConcept C147789679 @default.
- W2247488315 hasConcept C151730666 @default.
- W2247488315 hasConcept C171250308 @default.
- W2247488315 hasConcept C17525397 @default.
- W2247488315 hasConcept C175708663 @default.
- W2247488315 hasConcept C178790620 @default.
- W2247488315 hasConcept C185592680 @default.
- W2247488315 hasConcept C191897082 @default.
- W2247488315 hasConcept C192562407 @default.
- W2247488315 hasConcept C2779227376 @default.
- W2247488315 hasConcept C2779851234 @default.
- W2247488315 hasConcept C2816523 @default.
- W2247488315 hasConcept C30066665 @default.
- W2247488315 hasConcept C33574316 @default.
- W2247488315 hasConcept C42360764 @default.
- W2247488315 hasConcept C43617362 @default.
- W2247488315 hasConcept C44280652 @default.
- W2247488315 hasConcept C64297162 @default.
- W2247488315 hasConcept C69357855 @default.
- W2247488315 hasConcept C69544855 @default.
- W2247488315 hasConcept C86803240 @default.
- W2247488315 hasConcept C97355855 @default.
- W2247488315 hasConceptScore W2247488315C113196181 @default.
- W2247488315 hasConceptScore W2247488315C121332964 @default.
- W2247488315 hasConceptScore W2247488315C127413603 @default.
- W2247488315 hasConceptScore W2247488315C146088050 @default.
- W2247488315 hasConceptScore W2247488315C147789679 @default.
- W2247488315 hasConceptScore W2247488315C151730666 @default.
- W2247488315 hasConceptScore W2247488315C171250308 @default.
- W2247488315 hasConceptScore W2247488315C17525397 @default.
- W2247488315 hasConceptScore W2247488315C175708663 @default.
- W2247488315 hasConceptScore W2247488315C178790620 @default.
- W2247488315 hasConceptScore W2247488315C185592680 @default.
- W2247488315 hasConceptScore W2247488315C191897082 @default.
- W2247488315 hasConceptScore W2247488315C192562407 @default.
- W2247488315 hasConceptScore W2247488315C2779227376 @default.
- W2247488315 hasConceptScore W2247488315C2779851234 @default.
- W2247488315 hasConceptScore W2247488315C2816523 @default.
- W2247488315 hasConceptScore W2247488315C30066665 @default.
- W2247488315 hasConceptScore W2247488315C33574316 @default.
- W2247488315 hasConceptScore W2247488315C42360764 @default.
- W2247488315 hasConceptScore W2247488315C43617362 @default.
- W2247488315 hasConceptScore W2247488315C44280652 @default.
- W2247488315 hasConceptScore W2247488315C64297162 @default.
- W2247488315 hasConceptScore W2247488315C69357855 @default.
- W2247488315 hasConceptScore W2247488315C69544855 @default.
- W2247488315 hasConceptScore W2247488315C86803240 @default.