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- W2247644913 abstract "This paper investigates thereduction of parasitic resistance (JFET resistance) betweenthe p-well and the grounded p-type gate-oxide protection layer (BPW)of a trench-gate SiC-MOSFET. Forming a deeptrench is a way to reducethe JFET resistance, but this consequently leads to high electric field at thebottom oxide. In order to improve the trade-off between the specific on-resistance (R on,sp ) and the maximum bottom oxide electric field (E ox ), wenewly developed a trench-gate SiC-MOSFET with an n-type region, named DepletionStopper (DS), formed under the entire p-welllayer. As aresult of fabrication, R on,sp of the trench-gate SiC-MOSFET with DS is70 % lower than that without DS at a trench depth (d t ) of about 1.5 mm. The d t of the trench-gate SiC-MOSFET with DS can be designed 25 % shallower than thatwithout DS at a R on,sp of about 3.0 mWcm 2 .Therefore, it can reduce the JFET resistance and allow to shrinkthe trench depth. Optimizing the parametersof DS, the structure having DS is an effective means of reducing the JFETresistance, while reducing E ox by minimizing the depth of the trench." @default.
- W2247644913 created "2016-06-24" @default.
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- W2247644913 date "2015-06-01" @default.
- W2247644913 modified "2023-09-24" @default.
- W2247644913 title "Introduction of Depletion Stopper for Reduction of JFET Resistance for 4H-SiC Trench MOSFET" @default.
- W2247644913 cites W2076811599 @default.
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- W2247644913 doi "https://doi.org/10.4028/www.scientific.net/msf.821-823.761" @default.
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