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- W2247659963 abstract "Diamond-like carbon(DLC) films were deposited on buffer-layered ZnS substrates by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method. Ge and GeC buffer layers were used between DLC and ZnS subtrates to promote the adhesion DLC on ZnS substrates. Ge buffer layers were sputter deposited by RF magnetron sputtering and GeC' buffer layers were deposited by same method except using acetylene reactive gas. The ralationship between film properties and deposition conditions was investigated using gas pressure, RF power and dc bias voltage as PECVD parameters. The hardness of DLC films were measured by micro Vickers hardness test and the adhesion on DLC films on buffer-layered ZnS substrates were studied by Sebastian V stud pull tester. The optical properties of DLC films on buffer-layered ZnS substrates were charactered by ellipsometer and FTIR spectroscopy." @default.
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- W2247659963 date "1998-03-01" @default.
- W2247659963 modified "2023-09-23" @default.
- W2247659963 title "The Mechanical and Optical Properties of Diamond-like Carbon Films on Buffer-Layered Zinc Sulfide Substrates" @default.
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