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- W2247691701 abstract "This paper reports a 1.5 mm polycrystalline diamond Cylindrical Re gyroscope applications. The device i cylindrical shape using silicon on insul and deep reactive ion etching (DRIE flexibility of choosing different geomet for the resonator structure. A quality fac is measured at the 23 kHz 2 theta el modes, producing a ring-down time Annealing CRs at 700 °C in a nitr improved Q from 75,000 to over 300, symmetric fabrication results in CRs frequency mismatch of 3 Hz (130 ppm) b degenerate wineglass modes without ap voltage." @default.
- W2247691701 created "2016-06-24" @default.
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- W2247691701 date "2015-01-01" @default.
- W2247691701 modified "2023-09-24" @default.
- W2247691701 title "ED HIGH Q-FACTOR MICROCRY" @default.
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