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- W2256331609 abstract "In this paper experimental study has been made for the suitability of spin-on-glass (phosphorus doped) as an encapsulant for post-implantation anneal of GaAs. Spin-on-glass meets all the requirements of a good encapsulant. Obtained 55% activation for an implantation dose of 3 × 1012 cm−2 at 60 Kev and the mobility value was 3712 cm2 v−2 sec−2. The results obtained on uniformity of activation, and mobility are comparable to other processes. However, this technique has the advantage of low cost and simplicity." @default.
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- W2256331609 date "1990-09-01" @default.
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- W2256331609 title "Spin-on-glass as an Encapsulant for Annealing Si-Implanted GaAs" @default.
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- W2256331609 doi "https://doi.org/10.1080/02564602.1990.11438671" @default.
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