Matches in SemOpenAlex for { <https://semopenalex.org/work/W2256605848> ?p ?o ?g. }
- W2256605848 endingPage "424" @default.
- W2256605848 startingPage "414" @default.
- W2256605848 abstract "In this work, a simple and cost effective MEMS based gas sensor incorporating ZnO–CuO nanoflakes is presented. For ZnO–CuO nanoflakes synthesis, brass film was deposited on oxidized Si substrate by radio frequency (RF) diode sputtering and subsequently subjected to thermal oxidation process. The oxidized samples were characterized using SEM, XRD, XPS and Raman spectroscopy. For the fabrication of the complete sensor, planar MEMS technology with integrated microheater was adopted. This technology uses sputter deposited and recessed SiO2 platform in Si substrate for providing thermal isolation to reduce the power consumption of Ni microheater and prevents heat spreading from heater area. The microheater performance was simulated and experimentally verified. The sensor was tested for different toxic gases and volatile organic compounds (VOCs) over range of operating temperatures and concentrations for optimal sensing performances. The sensing results revealed that the sensor had highest response for acetone vapours over other gases. Also, it showed reproducible and stable performance." @default.
- W2256605848 created "2016-06-24" @default.
- W2256605848 creator A5008503608 @default.
- W2256605848 creator A5054523837 @default.
- W2256605848 date "2016-06-01" @default.
- W2256605848 modified "2023-10-12" @default.
- W2256605848 title "An innovative gas sensor incorporating ZnO–CuO nanoflakes in planar MEMS technology" @default.
- W2256605848 cites W1474682950 @default.
- W2256605848 cites W1514427291 @default.
- W2256605848 cites W1600988928 @default.
- W2256605848 cites W1965554550 @default.
- W2256605848 cites W1973428772 @default.
- W2256605848 cites W1979485235 @default.
- W2256605848 cites W1981059473 @default.
- W2256605848 cites W1981597141 @default.
- W2256605848 cites W1989412604 @default.
- W2256605848 cites W2001720257 @default.
- W2256605848 cites W2002845860 @default.
- W2256605848 cites W2004169646 @default.
- W2256605848 cites W2004387344 @default.
- W2256605848 cites W2005867837 @default.
- W2256605848 cites W2006885483 @default.
- W2256605848 cites W2007671684 @default.
- W2256605848 cites W2016334415 @default.
- W2256605848 cites W2017371204 @default.
- W2256605848 cites W2024376710 @default.
- W2256605848 cites W2025612196 @default.
- W2256605848 cites W2027679462 @default.
- W2256605848 cites W2029522810 @default.
- W2256605848 cites W2029741257 @default.
- W2256605848 cites W2031915204 @default.
- W2256605848 cites W2032976286 @default.
- W2256605848 cites W2033130629 @default.
- W2256605848 cites W2033605347 @default.
- W2256605848 cites W2034450873 @default.
- W2256605848 cites W2036684435 @default.
- W2256605848 cites W2037694920 @default.
- W2256605848 cites W2039553463 @default.
- W2256605848 cites W2039779415 @default.
- W2256605848 cites W2039975986 @default.
- W2256605848 cites W2047871611 @default.
- W2256605848 cites W2048026057 @default.
- W2256605848 cites W2058906400 @default.
- W2256605848 cites W2077230103 @default.
- W2256605848 cites W2085839875 @default.
- W2256605848 cites W2086622316 @default.
- W2256605848 cites W2087255048 @default.
- W2256605848 cites W2088967198 @default.
- W2256605848 cites W2103225083 @default.
- W2256605848 cites W2118466680 @default.
- W2256605848 cites W2123902118 @default.
- W2256605848 cites W2125155721 @default.
- W2256605848 cites W2129729573 @default.
- W2256605848 cites W2130197158 @default.
- W2256605848 cites W2133648393 @default.
- W2256605848 cites W2137508989 @default.
- W2256605848 cites W2142040311 @default.
- W2256605848 cites W2146426265 @default.
- W2256605848 cites W2147892226 @default.
- W2256605848 cites W2148502533 @default.
- W2256605848 cites W2148681626 @default.
- W2256605848 cites W2152560421 @default.
- W2256605848 cites W2163339963 @default.
- W2256605848 cites W2164103081 @default.
- W2256605848 cites W2320512866 @default.
- W2256605848 cites W2321485894 @default.
- W2256605848 cites W2330613568 @default.
- W2256605848 cites W2330772964 @default.
- W2256605848 cites W2418356540 @default.
- W2256605848 cites W266850138 @default.
- W2256605848 cites W2951853666 @default.
- W2256605848 cites W4385616447 @default.
- W2256605848 cites W990878371 @default.
- W2256605848 doi "https://doi.org/10.1016/j.snb.2016.01.079" @default.
- W2256605848 hasPublicationYear "2016" @default.
- W2256605848 type Work @default.
- W2256605848 sameAs 2256605848 @default.
- W2256605848 citedByCount "92" @default.
- W2256605848 countsByYear W22566058482016 @default.
- W2256605848 countsByYear W22566058482017 @default.
- W2256605848 countsByYear W22566058482018 @default.
- W2256605848 countsByYear W22566058482019 @default.
- W2256605848 countsByYear W22566058482020 @default.
- W2256605848 countsByYear W22566058482021 @default.
- W2256605848 countsByYear W22566058482022 @default.
- W2256605848 countsByYear W22566058482023 @default.
- W2256605848 crossrefType "journal-article" @default.
- W2256605848 hasAuthorship W2256605848A5008503608 @default.
- W2256605848 hasAuthorship W2256605848A5054523837 @default.
- W2256605848 hasConcept C111368507 @default.
- W2256605848 hasConcept C113196181 @default.
- W2256605848 hasConcept C120665830 @default.
- W2256605848 hasConcept C121332964 @default.
- W2256605848 hasConcept C127313418 @default.
- W2256605848 hasConcept C127413603 @default.
- W2256605848 hasConcept C136525101 @default.
- W2256605848 hasConcept C142724271 @default.
- W2256605848 hasConcept C171250308 @default.