Matches in SemOpenAlex for { <https://semopenalex.org/work/W2260127213> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2260127213 endingPage "001057" @default.
- W2260127213 startingPage "001052" @default.
- W2260127213 abstract "The fragility of MEM devices is one of the main concerns in case of standard packaging. Steps such as wafer dicing, die handling, assembly and wire bonding can seriously damage the device functionality if the MEM devices are not properly protected during the assembly processes. In this paper we report for the first time on bonding and removal of protective temporary caps used to ease the packaging of MEMS for optical applications. The package, based on a heat decomposable and photo-patternable polymer sealing ring, is gross leak tight, fulfills the MIL spec for shear testing and respects the thermal budget of Al-coated SiGe micro-mirrors. After release of the micro-mirrors at wafer level, a temporary cap with patterned Unity 2203P is bonded to the device wafer, enabling dicing, followed by assembly of the die to a PCB. This can be done by wire bonding and the cap will finally be removed by applying heat. The protective caps are assembled using a die to wafer approach on a flip-chip bonder. The caps are removed by thermal decomposition of the Unity film, leaving little residues in the patterned area. Debonding is done on the flip-chip tool, allowing a slow separation of the cap and MEMS wafer during heating. Several dies with released micro-mirrors were covered with temporary caps by using the optimized process. After dicing and debonding the mirrors were found to be unharmed. Optical and electrical measurements demonstrate the applicability of the process." @default.
- W2260127213 created "2016-06-24" @default.
- W2260127213 creator A5002895273 @default.
- W2260127213 creator A5006353399 @default.
- W2260127213 creator A5006560807 @default.
- W2260127213 creator A5011175609 @default.
- W2260127213 creator A5031627498 @default.
- W2260127213 creator A5046229422 @default.
- W2260127213 creator A5057759792 @default.
- W2260127213 creator A5066353851 @default.
- W2260127213 creator A5070426709 @default.
- W2260127213 creator A5071223809 @default.
- W2260127213 creator A5080224527 @default.
- W2260127213 creator A5083011814 @default.
- W2260127213 creator A5084259676 @default.
- W2260127213 date "2011-01-01" @default.
- W2260127213 modified "2023-10-03" @default.
- W2260127213 title "TEMPORARY PROTECTIVE PACKAGING FOR OPTICAL MEMS" @default.
- W2260127213 cites W1967493638 @default.
- W2260127213 cites W2004809924 @default.
- W2260127213 cites W2087159052 @default.
- W2260127213 doi "https://doi.org/10.4071/isom-2011-tha5-paper2" @default.
- W2260127213 hasPublicationYear "2011" @default.
- W2260127213 type Work @default.
- W2260127213 sameAs 2260127213 @default.
- W2260127213 citedByCount "0" @default.
- W2260127213 crossrefType "journal-article" @default.
- W2260127213 hasAuthorship W2260127213A5002895273 @default.
- W2260127213 hasAuthorship W2260127213A5006353399 @default.
- W2260127213 hasAuthorship W2260127213A5006560807 @default.
- W2260127213 hasAuthorship W2260127213A5011175609 @default.
- W2260127213 hasAuthorship W2260127213A5031627498 @default.
- W2260127213 hasAuthorship W2260127213A5046229422 @default.
- W2260127213 hasAuthorship W2260127213A5057759792 @default.
- W2260127213 hasAuthorship W2260127213A5066353851 @default.
- W2260127213 hasAuthorship W2260127213A5070426709 @default.
- W2260127213 hasAuthorship W2260127213A5071223809 @default.
- W2260127213 hasAuthorship W2260127213A5080224527 @default.
- W2260127213 hasAuthorship W2260127213A5083011814 @default.
- W2260127213 hasAuthorship W2260127213A5084259676 @default.
- W2260127213 hasConcept C111106434 @default.
- W2260127213 hasConcept C119599485 @default.
- W2260127213 hasConcept C127413603 @default.
- W2260127213 hasConcept C140269135 @default.
- W2260127213 hasConcept C159985019 @default.
- W2260127213 hasConcept C160671074 @default.
- W2260127213 hasConcept C165005293 @default.
- W2260127213 hasConcept C165013422 @default.
- W2260127213 hasConcept C171250308 @default.
- W2260127213 hasConcept C192562407 @default.
- W2260127213 hasConcept C2779133538 @default.
- W2260127213 hasConcept C2779227376 @default.
- W2260127213 hasConcept C2780288131 @default.
- W2260127213 hasConcept C37977207 @default.
- W2260127213 hasConcept C49040817 @default.
- W2260127213 hasConcept C68928338 @default.
- W2260127213 hasConcept C79072407 @default.
- W2260127213 hasConceptScore W2260127213C111106434 @default.
- W2260127213 hasConceptScore W2260127213C119599485 @default.
- W2260127213 hasConceptScore W2260127213C127413603 @default.
- W2260127213 hasConceptScore W2260127213C140269135 @default.
- W2260127213 hasConceptScore W2260127213C159985019 @default.
- W2260127213 hasConceptScore W2260127213C160671074 @default.
- W2260127213 hasConceptScore W2260127213C165005293 @default.
- W2260127213 hasConceptScore W2260127213C165013422 @default.
- W2260127213 hasConceptScore W2260127213C171250308 @default.
- W2260127213 hasConceptScore W2260127213C192562407 @default.
- W2260127213 hasConceptScore W2260127213C2779133538 @default.
- W2260127213 hasConceptScore W2260127213C2779227376 @default.
- W2260127213 hasConceptScore W2260127213C2780288131 @default.
- W2260127213 hasConceptScore W2260127213C37977207 @default.
- W2260127213 hasConceptScore W2260127213C49040817 @default.
- W2260127213 hasConceptScore W2260127213C68928338 @default.
- W2260127213 hasConceptScore W2260127213C79072407 @default.
- W2260127213 hasIssue "1" @default.
- W2260127213 hasLocation W22601272131 @default.
- W2260127213 hasOpenAccess W2260127213 @default.
- W2260127213 hasPrimaryLocation W22601272131 @default.
- W2260127213 hasRelatedWork W1511597299 @default.
- W2260127213 hasRelatedWork W1990064372 @default.
- W2260127213 hasRelatedWork W2100299767 @default.
- W2260127213 hasRelatedWork W2161765200 @default.
- W2260127213 hasRelatedWork W2168718532 @default.
- W2260127213 hasRelatedWork W2259428767 @default.
- W2260127213 hasRelatedWork W2260127213 @default.
- W2260127213 hasRelatedWork W2301302645 @default.
- W2260127213 hasRelatedWork W2507345448 @default.
- W2260127213 hasRelatedWork W2540312267 @default.
- W2260127213 hasVolume "2011" @default.
- W2260127213 isParatext "false" @default.
- W2260127213 isRetracted "false" @default.
- W2260127213 magId "2260127213" @default.
- W2260127213 workType "article" @default.