Matches in SemOpenAlex for { <https://semopenalex.org/work/W2260286239> ?p ?o ?g. }
Showing items 1 to 75 of
75
with 100 items per page.
- W2260286239 abstract "A new Volume of Fluid (VoF) method is applied to the problem surface evolution in two dimensions. The VoF technique is applied to problems that are representative of those that arise in semiconductor manufacturing, specifically photolithography and ion milling. The types of surface motion considered are those whose etch rates vary as a function of both surface position and orientation. Functionality is demonstrated for etch rates that are (non?)-convex in regard to surface orientation. A new method of computing surface curvature using divided differences of the volume fractions is also introduced and applied to the advancement of surfaces as a vanishing diffusive term." @default.
- W2260286239 created "2016-06-24" @default.
- W2260286239 creator A5029775474 @default.
- W2260286239 creator A5041996739 @default.
- W2260286239 date "1997-01-25" @default.
- W2260286239 modified "2023-10-14" @default.
- W2260286239 title "Non-convex profile evolution in two dimensions using volume of fluids" @default.
- W2260286239 doi "https://doi.org/10.2172/515975" @default.
- W2260286239 hasPublicationYear "1997" @default.
- W2260286239 type Work @default.
- W2260286239 sameAs 2260286239 @default.
- W2260286239 citedByCount "5" @default.
- W2260286239 countsByYear W22602862392015 @default.
- W2260286239 countsByYear W22602862392017 @default.
- W2260286239 crossrefType "report" @default.
- W2260286239 hasAuthorship W2260286239A5029775474 @default.
- W2260286239 hasAuthorship W2260286239A5041996739 @default.
- W2260286239 hasBestOaLocation W22602862393 @default.
- W2260286239 hasConcept C10138342 @default.
- W2260286239 hasConcept C105487726 @default.
- W2260286239 hasConcept C112680207 @default.
- W2260286239 hasConcept C121332964 @default.
- W2260286239 hasConcept C127210992 @default.
- W2260286239 hasConcept C162324750 @default.
- W2260286239 hasConcept C16345878 @default.
- W2260286239 hasConcept C171250308 @default.
- W2260286239 hasConcept C192562407 @default.
- W2260286239 hasConcept C195065555 @default.
- W2260286239 hasConcept C198082294 @default.
- W2260286239 hasConcept C199631012 @default.
- W2260286239 hasConcept C20556612 @default.
- W2260286239 hasConcept C2524010 @default.
- W2260286239 hasConcept C2776799497 @default.
- W2260286239 hasConcept C33923547 @default.
- W2260286239 hasConcept C38349280 @default.
- W2260286239 hasConcept C97355855 @default.
- W2260286239 hasConceptScore W2260286239C10138342 @default.
- W2260286239 hasConceptScore W2260286239C105487726 @default.
- W2260286239 hasConceptScore W2260286239C112680207 @default.
- W2260286239 hasConceptScore W2260286239C121332964 @default.
- W2260286239 hasConceptScore W2260286239C127210992 @default.
- W2260286239 hasConceptScore W2260286239C162324750 @default.
- W2260286239 hasConceptScore W2260286239C16345878 @default.
- W2260286239 hasConceptScore W2260286239C171250308 @default.
- W2260286239 hasConceptScore W2260286239C192562407 @default.
- W2260286239 hasConceptScore W2260286239C195065555 @default.
- W2260286239 hasConceptScore W2260286239C198082294 @default.
- W2260286239 hasConceptScore W2260286239C199631012 @default.
- W2260286239 hasConceptScore W2260286239C20556612 @default.
- W2260286239 hasConceptScore W2260286239C2524010 @default.
- W2260286239 hasConceptScore W2260286239C2776799497 @default.
- W2260286239 hasConceptScore W2260286239C33923547 @default.
- W2260286239 hasConceptScore W2260286239C38349280 @default.
- W2260286239 hasConceptScore W2260286239C97355855 @default.
- W2260286239 hasLocation W22602862391 @default.
- W2260286239 hasLocation W22602862392 @default.
- W2260286239 hasLocation W22602862393 @default.
- W2260286239 hasLocation W22602862394 @default.
- W2260286239 hasLocation W22602862395 @default.
- W2260286239 hasOpenAccess W2260286239 @default.
- W2260286239 hasPrimaryLocation W22602862391 @default.
- W2260286239 hasRelatedWork W1231423883 @default.
- W2260286239 hasRelatedWork W1498450933 @default.
- W2260286239 hasRelatedWork W1540141075 @default.
- W2260286239 hasRelatedWork W2004940036 @default.
- W2260286239 hasRelatedWork W2047496335 @default.
- W2260286239 hasRelatedWork W207565189 @default.
- W2260286239 hasRelatedWork W2490870784 @default.
- W2260286239 hasRelatedWork W2630121283 @default.
- W2260286239 hasRelatedWork W3174309227 @default.
- W2260286239 hasRelatedWork W809282740 @default.
- W2260286239 isParatext "false" @default.
- W2260286239 isRetracted "false" @default.
- W2260286239 magId "2260286239" @default.
- W2260286239 workType "report" @default.