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- W226036280 abstract "A mechanism of a breakdown of TiN barrier properties for multilayers of Al-1%Si-0.5%Cu/TiN/Ti/Si (100) substrates has been investigated by means of x-ray diffractometry (XRD), scanning Auger microscopy (SAM) and cross-sectional transmission electron microscopy (X-TEM). We observed that an intermediate layer, about 4 nm thick, formed at the Al-Si-Cu/TiN interface and among TiN grain boundaries after annealing at 450 °C for 30 min. The intermediate layer was found to be composed of various microcrystalline phases, corresponding to so-called metastable phases, in addition to developed crystalline phases, such as Ti3AlN. It is concluded that the formation and growth of the metastable phases occurred just before the breakdown of the TiN barrier properties, promoting the diffusion of Al, Ti and Si atoms through the TiN layer." @default.
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- W226036280 date "1994-01-01" @default.
- W226036280 modified "2023-09-25" @default.
- W226036280 title "Metastable Phase Formation in Al alloy/TiN/Ti/Si Systems" @default.
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- W226036280 doi "https://doi.org/10.1016/b978-0-444-81889-8.50078-x" @default.
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