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- W2260625764 abstract "Thermal convective accelerometers are based on heat transfer in a fluid-filled cavity. The principle is well known and the first MEMS implementations were reported in the late 90's. Since that time, many single-axis or dual-axis sensors were reported. The device presented in this paper is the first reported 3-axis sensor manufactured in a standard CMOS technology. Therefore, the goal of this study is to demonstrate the feasibility of a third sensitive axis on a single device and to provide MEMS designers with a compact model and the main parameters that govern the sensitivity." @default.
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- W2260625764 date "2013-04-16" @default.
- W2260625764 modified "2023-09-23" @default.
- W2260625764 title "FEM study of a 3-axis thermal accelerometer based on free convection in a microcavity" @default.
- W2260625764 hasPublicationYear "2013" @default.
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