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- W2261834363 abstract "The effects of ion implantation of Al/sub 2/O/sub 3/ followed by thermal annealing in a reducing environment have been studied and compared with the results obtained by annealing in an oxidizing environment. For the case of 160-keV implanted Fe, partially coherent crystalline precipitates are observed after annealing in an oxidizing environment, and evidence is presented that crystalline precipitates of a different nature also form during annealing in a reducing environment. The precipitates which form in an oxidizing annealing environment have a major channeling axis nearly aligned with the Al/sub 2/O/sub 3/ direction. These precipitates are tentatively identified as Fe/sub 3/O/sub 4/. Lattice damage recovery is also different in the two annealing environments." @default.
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- W2261834363 date "1984-10-01" @default.
- W2261834363 modified "2023-09-26" @default.
- W2261834363 title "Thermal annealing of Fe implanted Al/sub 2/O/sub 3/ in oxidizing and reducing environment. Revised version" @default.
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