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- W2265291320 abstract "Transition metal nitrides (ZrN x , NbN x and MoN x ) were deposited onto HSS substrates by reactive magnetron sputtering in a N₂/Ar atmosphere. Deposition rate, composition and some other properties were determined as a function of N₂ partial pressure, substrate temperature and bias voltage. Special emphasis was laid on the position of the metals in the periodic system of elements (IVa through VIa group). Deposition rate and film composition were strongly governed by the thermochemistry of the respective metal-nitrogen systems." @default.
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- W2265291320 date "1990-07-01" @default.
- W2265291320 modified "2023-10-06" @default.
- W2265291320 title "Transition Metal Nitride Thin Films by Magnetron Sputtering" @default.
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- W2265291320 hasPublicationYear "1990" @default.
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