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- W2266813997 abstract "This paper presents a meta-material-based design method for bar resonators with enhanced characteristics compared to those obtained with the typical bulk material implementation. We take advantage of the required release holes of MEMS processes to modify the local equivalent material properties ( r , E and n ) of the bar. While the available bulk material is homogeneous, the bar consists of an equivalent non-homogeneous material that can for example be distributed by design in order to shrink the overall resonator size, enhance electromechanical transduction coefficients or reject spurious modes. Our paper compares two extraction methods for the equivalent material properties of a periodically hole-punched material: the steady-state mechanical simulation of a unit cell and its “phase delay” counterpart. We discuss their validity and practical use for the design of bar resonators." @default.
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- W2266813997 date "2009-11-04" @default.
- W2266813997 modified "2023-09-25" @default.
- W2266813997 title "Acoustic meta-materials in MEMS bar resonators" @default.
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