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- W2267955877 abstract "A novel low specific on-resistance (Ron,sp) lateral double-diffused metal oxide semiconductor (LDMOS) with a buried improved super-junction (BISJ) layer is proposed. A super-junction layer is buried in the drift region and the P pillar is split into two parts with different doping concentrations. Firstly, the buried super-junction layer causes the multiple-direction assisted depletion effect. The drift region doping concentration of the BISJ LDMOS is therefore much higher than that of the conventional LDMOS. Secondly, the buried super-junction layer provides a bulk low on-resistance path. Both of them reduce Ron,sp greatly. Thirdly, the electric field modulation effect of the new electric field peak introduced by the step doped P pillar improves the breakdown voltage (BV). The BISJ LDMOS exhibits a BV of 300 V and Ron,sp of 8.08 mΩ·cm2 which increases BV by 35% and reduces Ron,sp by 60% compared with those of a conventional LDMOS with a drift length of 15 μm, respectively." @default.
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- W2267955877 date "2014-03-01" @default.
- W2267955877 modified "2023-09-23" @default.
- W2267955877 title "Low on-resistance high-voltage lateral double-diffused metal oxide semiconductor with a buried improved super-junction layer" @default.
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- W2267955877 doi "https://doi.org/10.1088/1674-1056/23/3/038503" @default.
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