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- W2269014025 endingPage "065022" @default.
- W2269014025 startingPage "065022" @default.
- W2269014025 abstract "The thorough characterizations of deposition plasma lead toimportant achievements in the fundamental understanding of thedeposition process, with a clear impact on the development oftechnology. Measurement of the spatial and, in the case ofpulse excited plasma, also temporal evolution, of theconcentrations of sputtered atoms and ions is a primary task inthe diagnostics of any sputter deposition plasma. However, itis difficult to estimate absolute number densities of thesputtered species (atoms and ions) in ground states directlyfrom optical emission spectroscopy, because the species in theground levels do not produce any optical signal. A method usingeffective branching fractions enables us to determine thedensity of non-radiating species from the intensities ofself-absorbed spectral lines. The branching fractions methoddescribed in the first part of this paper was applied todetermine the ground state densities of the sputtered titaniumatoms and ions. The method is based on fitting thetheoretically calculated branching fractions to experimentallymeasured ratios of the relative intensities of carefullyselected resonant titanium atomic and ionic lines. Thesputtered species density is determined in our experimentalsetup with a relative uncertainty of less than 5% for the dcdriven magnetron and typically 15% for time-resolvedmeasurements of high- power impulse magnetron sputtering(HiPIMS) discharge. In the second part of the paper, the methodwas applied to determine the evolution of titanium atom and iondensities in three typical cases ranging from the dc drivensputter process to HiPIMS." @default.
- W2269014025 created "2016-06-24" @default.
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- W2269014025 date "2015-11-25" @default.
- W2269014025 modified "2023-10-16" @default.
- W2269014025 title "Determination of titanium atom and ion densities in sputter deposition plasmas by optical emission spectroscopy" @default.
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- W2269014025 doi "https://doi.org/10.1088/0963-0252/24/6/065022" @default.
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