Matches in SemOpenAlex for { <https://semopenalex.org/work/W2269553676> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2269553676 endingPage "360" @default.
- W2269553676 startingPage "341" @default.
- W2269553676 abstract "The size and cost of indirect calorimeters hinder their application in hospitals. This study employs micro-electromechanical systems MEMS techniques to develop oxygen sensors as one part of a miniaturized energy consumption measurement system for premature babies. Typically, the system is designed to operate at high oxygen concentrations. Accordingly, the current study deals with the development of oxygen sensors capable of sensing higher concentrations of oxygen at a low operation temperature of 150°C. The proposed gas sensors consist of a polysilicon resistor and a sensing metal-oxide film placed on a thermally isolated silicon-nitride membrane or bridge. The sensing film is a tin oxide sheet, which has been doped with a low concentration of 2wt% Li. This study involves the development of three different types of oxygen sensors, which are distinguished from each other by the structure of their microheaters. The first type is a microheater on a silicon nitride membrane, the second type employs a membrane located on a thin silicon layer, and the third type uses a bridge membrane with a thin underlying layer of silicon. At an operating temperature of 150°C, the power consumptions of these three sensors are found to be 24 mW, 223 mW and 1240 mW, respectively. The resulting experimental data indicate that the proposed oxygen sensors are capable of detecting oxygen with concentrations ranging from 21% to 50%, and that they exhibit a linear output behavior. These characteristics render the oxygen sensors suitable for use in most clinical applications within a hospital environment." @default.
- W2269553676 created "2016-06-24" @default.
- W2269553676 creator A5000716202 @default.
- W2269553676 creator A5007513075 @default.
- W2269553676 creator A5028682042 @default.
- W2269553676 creator A5035177540 @default.
- W2269553676 creator A5036244072 @default.
- W2269553676 date "2003-11-01" @default.
- W2269553676 modified "2023-09-23" @default.
- W2269553676 title "Design and fabrication issues on micromachined oxygen sensors for miniaturized energy consumption measurement systems" @default.
- W2269553676 cites W2000652300 @default.
- W2269553676 cites W2047922146 @default.
- W2269553676 hasPublicationYear "2003" @default.
- W2269553676 type Work @default.
- W2269553676 sameAs 2269553676 @default.
- W2269553676 citedByCount "1" @default.
- W2269553676 crossrefType "journal-article" @default.
- W2269553676 hasAuthorship W2269553676A5000716202 @default.
- W2269553676 hasAuthorship W2269553676A5007513075 @default.
- W2269553676 hasAuthorship W2269553676A5028682042 @default.
- W2269553676 hasAuthorship W2269553676A5035177540 @default.
- W2269553676 hasAuthorship W2269553676A5036244072 @default.
- W2269553676 hasConcept C136525101 @default.
- W2269553676 hasConcept C142724271 @default.
- W2269553676 hasConcept C171250308 @default.
- W2269553676 hasConcept C17734536 @default.
- W2269553676 hasConcept C178790620 @default.
- W2269553676 hasConcept C185592680 @default.
- W2269553676 hasConcept C191897082 @default.
- W2269553676 hasConcept C192562407 @default.
- W2269553676 hasConcept C204787440 @default.
- W2269553676 hasConcept C2777431650 @default.
- W2269553676 hasConcept C2779227376 @default.
- W2269553676 hasConcept C2779426163 @default.
- W2269553676 hasConcept C2779851234 @default.
- W2269553676 hasConcept C37977207 @default.
- W2269553676 hasConcept C49040817 @default.
- W2269553676 hasConcept C540031477 @default.
- W2269553676 hasConcept C544956773 @default.
- W2269553676 hasConcept C71924100 @default.
- W2269553676 hasConceptScore W2269553676C136525101 @default.
- W2269553676 hasConceptScore W2269553676C142724271 @default.
- W2269553676 hasConceptScore W2269553676C171250308 @default.
- W2269553676 hasConceptScore W2269553676C17734536 @default.
- W2269553676 hasConceptScore W2269553676C178790620 @default.
- W2269553676 hasConceptScore W2269553676C185592680 @default.
- W2269553676 hasConceptScore W2269553676C191897082 @default.
- W2269553676 hasConceptScore W2269553676C192562407 @default.
- W2269553676 hasConceptScore W2269553676C204787440 @default.
- W2269553676 hasConceptScore W2269553676C2777431650 @default.
- W2269553676 hasConceptScore W2269553676C2779227376 @default.
- W2269553676 hasConceptScore W2269553676C2779426163 @default.
- W2269553676 hasConceptScore W2269553676C2779851234 @default.
- W2269553676 hasConceptScore W2269553676C37977207 @default.
- W2269553676 hasConceptScore W2269553676C49040817 @default.
- W2269553676 hasConceptScore W2269553676C540031477 @default.
- W2269553676 hasConceptScore W2269553676C544956773 @default.
- W2269553676 hasConceptScore W2269553676C71924100 @default.
- W2269553676 hasIssue "7" @default.
- W2269553676 hasOpenAccess W2269553676 @default.
- W2269553676 hasRelatedWork W1964716149 @default.
- W2269553676 hasRelatedWork W1968401285 @default.
- W2269553676 hasRelatedWork W1985080846 @default.
- W2269553676 hasRelatedWork W2001293614 @default.
- W2269553676 hasRelatedWork W2001472888 @default.
- W2269553676 hasRelatedWork W2001714940 @default.
- W2269553676 hasRelatedWork W2006539978 @default.
- W2269553676 hasRelatedWork W2021431023 @default.
- W2269553676 hasRelatedWork W2024199595 @default.
- W2269553676 hasRelatedWork W2025980613 @default.
- W2269553676 hasRelatedWork W2037825052 @default.
- W2269553676 hasRelatedWork W2126980717 @default.
- W2269553676 hasRelatedWork W2147582870 @default.
- W2269553676 hasRelatedWork W2579853265 @default.
- W2269553676 hasRelatedWork W2621117098 @default.
- W2269553676 hasRelatedWork W2943636945 @default.
- W2269553676 hasRelatedWork W835457007 @default.
- W2269553676 hasRelatedWork W2155842017 @default.
- W2269553676 hasRelatedWork W2299805362 @default.
- W2269553676 hasRelatedWork W3023287657 @default.
- W2269553676 hasVolume "15" @default.
- W2269553676 isParatext "false" @default.
- W2269553676 isRetracted "false" @default.
- W2269553676 magId "2269553676" @default.
- W2269553676 workType "article" @default.