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- W2270289310 abstract "Commercial low temperature cofired ceramic (LTCC) technology is established in microelectronics and microsystems packaging, multichip and radio frequency (RF) modules, and sensors. The ability to combine structural considerations with embedded traces and components using laminated glass-ceramic tapes has created solutions to unconventional packaging requirements of micro-electro-mechanical systems (MEMS) devices. Many MEMS devices such as resonators are very sensitive to pressure and require packaging in a vacuum environment. Attaining and maintaining desirable pressure levels in sealed vacuum packages requires knowledge of the permeation characteristics of the vacuum envelope and the sealing materials. An experimental system to measure the time dependent gas permeation through LTCC at temperatures from room temperature to 500°C has been developed. This system utilizes a membrane technique in which a gas is allowed to permeate through a test sample, held at a constant temperature, into a high vacuum chamber where it is detected using mass spectrometry. The gas permeation value is determined from the steady state gas flux through the sample. The gas diffusivity and solubility in the material were calculated using data from the time dependent approach to the steady state condition. The gas-solid permeation data for helium through DuPont 951 LTCC is presented and compared to the permeation through other common vacuum envelope materials such as glasses and high-purity alumina ceramics. Application of the permeation data to the prediction of vacuum levels inside typical LTCC packaging is discussed. This data can further be utilized in designs to create LTCC packages that meet specific pressure/time operating requirements." @default.
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- W2270289310 date "2012-09-01" @default.
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- W2270289310 title "Gas Permeation Measurements on Low Temperature Cofired Ceramics" @default.
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