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• W2270826607 endingPage "356" @default.
• W2270826607 startingPage "352" @default.
• W2270826607 abstract "Ceramic oxide thin films are an important material, with applications in many areas of science and technology. Titanium oxide (TiO 2 ) is also a well-known and important material for applications such as gas sensors [1], photocatalysis materials [3], and electrochemicals [1], due to its self-cleaning [2], good corrosion resistance and biocompatibility. Atomic Layer Deposition (ALD) is a nanotechnology tool that is used for the deposition of nanostructured thin films. The unique advantage of ALD is the self-limiting film growth mechanism, which offers attractive properties, simple and accurate film thickness control, sharp interfaces, uniformity over large areas, excellent conformality, good reproducibility, a multilayer processing capability, and high quality films at low temperatures [3, 4]. TiO 2 thin films were grown using TTIP (Titanium isopropoxide) ALD on silicon wafers, glass slides, and stainless steel plates in order to study the effect of substrates on the growth of TiO 2 . In order to achieve the desired advantages of using TTIP, a series of experiments were performed to study the growth mechanism of TiO 2 thin films using TTIP and H 2 O by ALD." @default.
• W2270826607 created "2016-06-24" @default.
• W2270826607 creator A5026858047 @default.
• W2270826607 creator A5062752526 @default.
• W2270826607 creator A5086895554 @default.
• W2270826607 date "2016-01-01" @default.
• W2270826607 modified "2023-10-16" @default.
• W2270826607 title "Growth of TiO₂ Thin Films by Atomic Layer Deposition (ALD)" @default.
• W2270826607 cites W115230004 @default.
• W2270826607 cites W1969317961 @default.
• W2270826607 cites W1980039834 @default.
• W2270826607 cites W1995987129 @default.
• W2270826607 cites W2020527881 @default.
• W2270826607 cites W2031598057 @default.
• W2270826607 cites W2034385722 @default.
• W2270826607 cites W2036273048 @default.
• W2270826607 cites W2041634964 @default.
• W2270826607 cites W2053721948 @default.
• W2270826607 cites W2055857306 @default.
• W2270826607 cites W2073624022 @default.
• W2270826607 cites W2077869008 @default.
• W2270826607 cites W2080087531 @default.
• W2270826607 cites W2081899076 @default.
• W2270826607 cites W2085263102 @default.
• W2270826607 cites W2120491593 @default.
• W2270826607 cites W2136093736 @default.
• W2270826607 cites W2138405719 @default.
• W2270826607 cites W2164788318 @default.
• W2270826607 doi "https://doi.org/10.4028/www.scientific.net/amr.1133.352" @default.
• W2270826607 hasPublicationYear "2016" @default.
• W2270826607 type Work @default.
• W2270826607 sameAs 2270826607 @default.
• W2270826607 citedByCount "14" @default.
• W2270826607 countsByYear W22708266072018 @default.
• W2270826607 countsByYear W22708266072019 @default.
• W2270826607 countsByYear W22708266072020 @default.
• W2270826607 countsByYear W22708266072021 @default.
• W2270826607 countsByYear W22708266072022 @default.
• W2270826607 countsByYear W22708266072023 @default.
• W2270826607 crossrefType "journal-article" @default.
• W2270826607 hasAuthorship W2270826607A5026858047 @default.
• W2270826607 hasAuthorship W2270826607A5062752526 @default.
• W2270826607 hasAuthorship W2270826607A5086895554 @default.
• W2270826607 hasConcept C127413603 @default.
• W2270826607 hasConcept C151730666 @default.
• W2270826607 hasConcept C160671074 @default.
• W2270826607 hasConcept C161790260 @default.
• W2270826607 hasConcept C166524527 @default.
• W2270826607 hasConcept C171250308 @default.
• W2270826607 hasConcept C185592680 @default.
• W2270826607 hasConcept C19067145 @default.
• W2270826607 hasConcept C191897082 @default.
• W2270826607 hasConcept C192562407 @default.
• W2270826607 hasConcept C2779227376 @default.
• W2270826607 hasConcept C2779851234 @default.
• W2270826607 hasConcept C2816523 @default.
• W2270826607 hasConcept C42360764 @default.
• W2270826607 hasConcept C48123060 @default.
• W2270826607 hasConcept C506065880 @default.
• W2270826607 hasConcept C544956773 @default.
• W2270826607 hasConcept C55493867 @default.
• W2270826607 hasConcept C64297162 @default.
• W2270826607 hasConcept C65165184 @default.
• W2270826607 hasConcept C69544855 @default.
• W2270826607 hasConcept C86803240 @default.
• W2270826607 hasConceptScore W2270826607C127413603 @default.
• W2270826607 hasConceptScore W2270826607C151730666 @default.
• W2270826607 hasConceptScore W2270826607C160671074 @default.
• W2270826607 hasConceptScore W2270826607C161790260 @default.
• W2270826607 hasConceptScore W2270826607C166524527 @default.
• W2270826607 hasConceptScore W2270826607C171250308 @default.
• W2270826607 hasConceptScore W2270826607C185592680 @default.
• W2270826607 hasConceptScore W2270826607C19067145 @default.
• W2270826607 hasConceptScore W2270826607C191897082 @default.
• W2270826607 hasConceptScore W2270826607C192562407 @default.
• W2270826607 hasConceptScore W2270826607C2779227376 @default.
• W2270826607 hasConceptScore W2270826607C2779851234 @default.
• W2270826607 hasConceptScore W2270826607C2816523 @default.
• W2270826607 hasConceptScore W2270826607C42360764 @default.
• W2270826607 hasConceptScore W2270826607C48123060 @default.
• W2270826607 hasConceptScore W2270826607C506065880 @default.
• W2270826607 hasConceptScore W2270826607C544956773 @default.
• W2270826607 hasConceptScore W2270826607C55493867 @default.
• W2270826607 hasConceptScore W2270826607C64297162 @default.
• W2270826607 hasConceptScore W2270826607C65165184 @default.
• W2270826607 hasConceptScore W2270826607C69544855 @default.
• W2270826607 hasConceptScore W2270826607C86803240 @default.
• W2270826607 hasLocation W22708266071 @default.
• W2270826607 hasOpenAccess W2270826607 @default.
• W2270826607 hasPrimaryLocation W22708266071 @default.
• W2270826607 hasRelatedWork W2012445711 @default.
• W2270826607 hasRelatedWork W2025108481 @default.
• W2270826607 hasRelatedWork W2044079975 @default.
• W2270826607 hasRelatedWork W2070084956 @default.
• W2270826607 hasRelatedWork W2370413025 @default.
• W2270826607 hasRelatedWork W2997992459 @default.
• W2270826607 hasRelatedWork W3010468778 @default.
• W2270826607 hasRelatedWork W4220894472 @default.

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