Matches in SemOpenAlex for { <https://semopenalex.org/work/W2273404310> ?p ?o ?g. }
- W2273404310 endingPage "031304" @default.
- W2273404310 startingPage "031304" @default.
- W2273404310 abstract "Abstract The successful formation of abrupt phosphorus (P) δ-doping profiles in germanium (Ge) is reported. When the P δ-doping layers were grown by molecular beam epitaxy (MBE) directly on Ge wafers whose surfaces had residual carbon impurities, more than a half the phosphorus atoms were confined successfully within a few nm of the initial doping position even after the growth of Ge capping layers on the top. On the other hand, the same P layers grown on Ge buffer layers that had much less carbon showed significantly broadened P concentration profiles. Current–voltage characteristics of Au/Ti/Ge capping/P δ-doping/n-Ge structures having the abrupt P δ-doping layers with carbon assistance showed excellent ohmic behaviors when P doses were higher than 1 × 10 14 cm −2 and the capping layer thickness was as thin as 5 nm. Therefore, the insertion of carbon around the P doping layer is a useful way of realizing ultrashallow junctions in Ge." @default.
- W2273404310 created "2016-06-24" @default.
- W2273404310 creator A5000261113 @default.
- W2273404310 creator A5003718500 @default.
- W2273404310 creator A5011393565 @default.
- W2273404310 creator A5021331933 @default.
- W2273404310 creator A5035414131 @default.
- W2273404310 creator A5054954745 @default.
- W2273404310 creator A5058775745 @default.
- W2273404310 date "2016-02-04" @default.
- W2273404310 modified "2023-09-23" @default.
- W2273404310 title "Suppression of segregation of the phosphorus δ-doping layer in germanium by incorporation of carbon" @default.
- W2273404310 cites W1563217459 @default.
- W2273404310 cites W1967015913 @default.
- W2273404310 cites W1967753446 @default.
- W2273404310 cites W1969261628 @default.
- W2273404310 cites W1970336860 @default.
- W2273404310 cites W1973883873 @default.
- W2273404310 cites W1974585893 @default.
- W2273404310 cites W1981419596 @default.
- W2273404310 cites W1996564554 @default.
- W2273404310 cites W1997033739 @default.
- W2273404310 cites W1999496942 @default.
- W2273404310 cites W2001211339 @default.
- W2273404310 cites W2021957902 @default.
- W2273404310 cites W2024290900 @default.
- W2273404310 cites W2026840937 @default.
- W2273404310 cites W2027626977 @default.
- W2273404310 cites W2029883001 @default.
- W2273404310 cites W2031327503 @default.
- W2273404310 cites W2045115512 @default.
- W2273404310 cites W2048420322 @default.
- W2273404310 cites W2051412204 @default.
- W2273404310 cites W2055929832 @default.
- W2273404310 cites W2061002057 @default.
- W2273404310 cites W2071226598 @default.
- W2273404310 cites W2072980359 @default.
- W2273404310 cites W2076395102 @default.
- W2273404310 cites W2079182757 @default.
- W2273404310 cites W2093906289 @default.
- W2273404310 cites W2123940698 @default.
- W2273404310 cites W2126130407 @default.
- W2273404310 cites W2131073671 @default.
- W2273404310 cites W2134650979 @default.
- W2273404310 cites W2322186080 @default.
- W2273404310 doi "https://doi.org/10.7567/jjap.55.031304" @default.
- W2273404310 hasPublicationYear "2016" @default.
- W2273404310 type Work @default.
- W2273404310 sameAs 2273404310 @default.
- W2273404310 citedByCount "4" @default.
- W2273404310 countsByYear W22734043102017 @default.
- W2273404310 countsByYear W22734043102018 @default.
- W2273404310 crossrefType "journal-article" @default.
- W2273404310 hasAuthorship W2273404310A5000261113 @default.
- W2273404310 hasAuthorship W2273404310A5003718500 @default.
- W2273404310 hasAuthorship W2273404310A5011393565 @default.
- W2273404310 hasAuthorship W2273404310A5021331933 @default.
- W2273404310 hasAuthorship W2273404310A5035414131 @default.
- W2273404310 hasAuthorship W2273404310A5054954745 @default.
- W2273404310 hasAuthorship W2273404310A5058775745 @default.
- W2273404310 hasConcept C104779481 @default.
- W2273404310 hasConcept C110738630 @default.
- W2273404310 hasConcept C113196181 @default.
- W2273404310 hasConcept C138230450 @default.
- W2273404310 hasConcept C140205800 @default.
- W2273404310 hasConcept C159985019 @default.
- W2273404310 hasConcept C160671074 @default.
- W2273404310 hasConcept C171250308 @default.
- W2273404310 hasConcept C178790620 @default.
- W2273404310 hasConcept C185592680 @default.
- W2273404310 hasConcept C191897082 @default.
- W2273404310 hasConcept C192562407 @default.
- W2273404310 hasConcept C2779227376 @default.
- W2273404310 hasConcept C3792809 @default.
- W2273404310 hasConcept C43617362 @default.
- W2273404310 hasConcept C49040817 @default.
- W2273404310 hasConcept C510538283 @default.
- W2273404310 hasConcept C544956773 @default.
- W2273404310 hasConcept C550623735 @default.
- W2273404310 hasConcept C57863236 @default.
- W2273404310 hasConcept C71987851 @default.
- W2273404310 hasConceptScore W2273404310C104779481 @default.
- W2273404310 hasConceptScore W2273404310C110738630 @default.
- W2273404310 hasConceptScore W2273404310C113196181 @default.
- W2273404310 hasConceptScore W2273404310C138230450 @default.
- W2273404310 hasConceptScore W2273404310C140205800 @default.
- W2273404310 hasConceptScore W2273404310C159985019 @default.
- W2273404310 hasConceptScore W2273404310C160671074 @default.
- W2273404310 hasConceptScore W2273404310C171250308 @default.
- W2273404310 hasConceptScore W2273404310C178790620 @default.
- W2273404310 hasConceptScore W2273404310C185592680 @default.
- W2273404310 hasConceptScore W2273404310C191897082 @default.
- W2273404310 hasConceptScore W2273404310C192562407 @default.
- W2273404310 hasConceptScore W2273404310C2779227376 @default.
- W2273404310 hasConceptScore W2273404310C3792809 @default.
- W2273404310 hasConceptScore W2273404310C43617362 @default.
- W2273404310 hasConceptScore W2273404310C49040817 @default.
- W2273404310 hasConceptScore W2273404310C510538283 @default.