Matches in SemOpenAlex for { <https://semopenalex.org/work/W2274101181> ?p ?o ?g. }
- W2274101181 endingPage "68" @default.
- W2274101181 startingPage "62" @default.
- W2274101181 abstract "Optical lithography technique has been applied to fabricate devices from atomically thin sheets, exfoliated mechanically from kish graphite, bulk MoS2 and WSe2. During the fabrication processes, the exfoliated graphene, few-layer MoS2 and WSe2 sheets have been patterned into specific shapes as required and metal contacts have been deposited on these two-dimensional sheets to make field effect devices with different structures. The key to the successful implementation of the technique is the appropriate alignment mark design, which can solve the problems of aligning photomasks to the random location, orientation and irregular shape exfoliated two-dimensional sheets on the substrates. Raman characterization performed on the patterned two-dimensional sheets after the fabrication processes shows that little defects have been introduced during fabrication. Field effect has been observed from I–V characteristics with the highly doped silicon substrate as the back gate. The extracted field effect hole and electron mobilities of graphene are ~ 1010 cm2 V− 1 s− 1 and ~ 3550 cm2 V− 1 s− 1 respectively; and the field effect carrier mobilities of MoS2 and WSe2 are ~ 0.06 cm2 V− 1 s− 1 and ~ 0.03 cm2 V− 1 s− 1, separately, which are comparable with experimental results of other reports." @default.
- W2274101181 created "2016-06-24" @default.
- W2274101181 creator A5024818901 @default.
- W2274101181 creator A5045531749 @default.
- W2274101181 creator A5052962241 @default.
- W2274101181 creator A5053861841 @default.
- W2274101181 date "2016-03-01" @default.
- W2274101181 modified "2023-09-30" @default.
- W2274101181 title "Optical lithography technique for the fabrication of devices from mechanically exfoliated two-dimensional materials" @default.
- W2274101181 cites W1927677023 @default.
- W2274101181 cites W1975236307 @default.
- W2274101181 cites W1978611329 @default.
- W2274101181 cites W1978973235 @default.
- W2274101181 cites W1981053966 @default.
- W2274101181 cites W1982876375 @default.
- W2274101181 cites W1996905251 @default.
- W2274101181 cites W2015381593 @default.
- W2274101181 cites W2020156088 @default.
- W2274101181 cites W2021994802 @default.
- W2274101181 cites W2030315493 @default.
- W2274101181 cites W2034172706 @default.
- W2274101181 cites W2037811931 @default.
- W2274101181 cites W2048513650 @default.
- W2274101181 cites W2048610167 @default.
- W2274101181 cites W2058122340 @default.
- W2274101181 cites W2070384004 @default.
- W2274101181 cites W2073204076 @default.
- W2274101181 cites W2073321070 @default.
- W2274101181 cites W2078204579 @default.
- W2274101181 cites W2098831830 @default.
- W2274101181 cites W2099012133 @default.
- W2274101181 cites W2109305701 @default.
- W2274101181 cites W2115786064 @default.
- W2274101181 cites W2136334331 @default.
- W2274101181 cites W2142237143 @default.
- W2274101181 cites W2149032140 @default.
- W2274101181 cites W2157876253 @default.
- W2274101181 cites W2167452346 @default.
- W2274101181 cites W2318692914 @default.
- W2274101181 cites W2321206829 @default.
- W2274101181 cites W2328412715 @default.
- W2274101181 cites W3098123061 @default.
- W2274101181 cites W3103305114 @default.
- W2274101181 cites W3104079565 @default.
- W2274101181 cites W4211172053 @default.
- W2274101181 doi "https://doi.org/10.1016/j.mee.2016.01.038" @default.
- W2274101181 hasPublicationYear "2016" @default.
- W2274101181 type Work @default.
- W2274101181 sameAs 2274101181 @default.
- W2274101181 citedByCount "11" @default.
- W2274101181 countsByYear W22741011812017 @default.
- W2274101181 countsByYear W22741011812018 @default.
- W2274101181 countsByYear W22741011812019 @default.
- W2274101181 countsByYear W22741011812020 @default.
- W2274101181 countsByYear W22741011812021 @default.
- W2274101181 countsByYear W22741011812022 @default.
- W2274101181 crossrefType "journal-article" @default.
- W2274101181 hasAuthorship W2274101181A5024818901 @default.
- W2274101181 hasAuthorship W2274101181A5045531749 @default.
- W2274101181 hasAuthorship W2274101181A5052962241 @default.
- W2274101181 hasAuthorship W2274101181A5053861841 @default.
- W2274101181 hasBestOaLocation W22741011811 @default.
- W2274101181 hasConcept C111368507 @default.
- W2274101181 hasConcept C120665830 @default.
- W2274101181 hasConcept C121332964 @default.
- W2274101181 hasConcept C127313418 @default.
- W2274101181 hasConcept C136525101 @default.
- W2274101181 hasConcept C142724271 @default.
- W2274101181 hasConcept C159985019 @default.
- W2274101181 hasConcept C171250308 @default.
- W2274101181 hasConcept C192562407 @default.
- W2274101181 hasConcept C204223013 @default.
- W2274101181 hasConcept C204787440 @default.
- W2274101181 hasConcept C2777289219 @default.
- W2274101181 hasConcept C2779698641 @default.
- W2274101181 hasConcept C30080830 @default.
- W2274101181 hasConcept C40003534 @default.
- W2274101181 hasConcept C49040817 @default.
- W2274101181 hasConcept C544956773 @default.
- W2274101181 hasConcept C71924100 @default.
- W2274101181 hasConceptScore W2274101181C111368507 @default.
- W2274101181 hasConceptScore W2274101181C120665830 @default.
- W2274101181 hasConceptScore W2274101181C121332964 @default.
- W2274101181 hasConceptScore W2274101181C127313418 @default.
- W2274101181 hasConceptScore W2274101181C136525101 @default.
- W2274101181 hasConceptScore W2274101181C142724271 @default.
- W2274101181 hasConceptScore W2274101181C159985019 @default.
- W2274101181 hasConceptScore W2274101181C171250308 @default.
- W2274101181 hasConceptScore W2274101181C192562407 @default.
- W2274101181 hasConceptScore W2274101181C204223013 @default.
- W2274101181 hasConceptScore W2274101181C204787440 @default.
- W2274101181 hasConceptScore W2274101181C2777289219 @default.
- W2274101181 hasConceptScore W2274101181C2779698641 @default.
- W2274101181 hasConceptScore W2274101181C30080830 @default.
- W2274101181 hasConceptScore W2274101181C40003534 @default.
- W2274101181 hasConceptScore W2274101181C49040817 @default.
- W2274101181 hasConceptScore W2274101181C544956773 @default.
- W2274101181 hasConceptScore W2274101181C71924100 @default.