Matches in SemOpenAlex for { <https://semopenalex.org/work/W2274895251> ?p ?o ?g. }
Showing items 1 to 73 of
73
with 100 items per page.
- W2274895251 abstract "The annealing behaviour of doses up to 4. 10**1**6 ions/cm**2 implanted at ion currents up to 10ma is described. Differences between rapid isothermal and furnace annealing in the measured sheet resistances are due to different amounts of diffusion and to loss of dopant by evaporation. Implantation at high currents (10ma) does not appear to affect the quality of the regrown material provided the temperature rise during implantation is small." @default.
- W2274895251 created "2016-06-24" @default.
- W2274895251 creator A5021197541 @default.
- W2274895251 creator A5054725351 @default.
- W2274895251 creator A5060677424 @default.
- W2274895251 date "1983-10-01" @default.
- W2274895251 modified "2023-09-24" @default.
- W2274895251 title "ANNEALING BEHAVIOUR OF HIGH DOSE As** plus IMPLANTS." @default.
- W2274895251 hasPublicationYear "1983" @default.
- W2274895251 type Work @default.
- W2274895251 sameAs 2274895251 @default.
- W2274895251 citedByCount "0" @default.
- W2274895251 crossrefType "journal-article" @default.
- W2274895251 hasAuthorship W2274895251A5021197541 @default.
- W2274895251 hasAuthorship W2274895251A5054725351 @default.
- W2274895251 hasAuthorship W2274895251A5060677424 @default.
- W2274895251 hasConcept C113196181 @default.
- W2274895251 hasConcept C121332964 @default.
- W2274895251 hasConcept C133347239 @default.
- W2274895251 hasConcept C145148216 @default.
- W2274895251 hasConcept C178790620 @default.
- W2274895251 hasConcept C185592680 @default.
- W2274895251 hasConcept C191897082 @default.
- W2274895251 hasConcept C191952053 @default.
- W2274895251 hasConcept C192562407 @default.
- W2274895251 hasConcept C2777855556 @default.
- W2274895251 hasConcept C41823505 @default.
- W2274895251 hasConcept C43617362 @default.
- W2274895251 hasConcept C49040817 @default.
- W2274895251 hasConcept C57863236 @default.
- W2274895251 hasConcept C97355855 @default.
- W2274895251 hasConceptScore W2274895251C113196181 @default.
- W2274895251 hasConceptScore W2274895251C121332964 @default.
- W2274895251 hasConceptScore W2274895251C133347239 @default.
- W2274895251 hasConceptScore W2274895251C145148216 @default.
- W2274895251 hasConceptScore W2274895251C178790620 @default.
- W2274895251 hasConceptScore W2274895251C185592680 @default.
- W2274895251 hasConceptScore W2274895251C191897082 @default.
- W2274895251 hasConceptScore W2274895251C191952053 @default.
- W2274895251 hasConceptScore W2274895251C192562407 @default.
- W2274895251 hasConceptScore W2274895251C2777855556 @default.
- W2274895251 hasConceptScore W2274895251C41823505 @default.
- W2274895251 hasConceptScore W2274895251C43617362 @default.
- W2274895251 hasConceptScore W2274895251C49040817 @default.
- W2274895251 hasConceptScore W2274895251C57863236 @default.
- W2274895251 hasConceptScore W2274895251C97355855 @default.
- W2274895251 hasLocation W22748952511 @default.
- W2274895251 hasOpenAccess W2274895251 @default.
- W2274895251 hasPrimaryLocation W22748952511 @default.
- W2274895251 hasRelatedWork W1643904691 @default.
- W2274895251 hasRelatedWork W1986285647 @default.
- W2274895251 hasRelatedWork W1996201697 @default.
- W2274895251 hasRelatedWork W2002409439 @default.
- W2274895251 hasRelatedWork W2025706092 @default.
- W2274895251 hasRelatedWork W2035409454 @default.
- W2274895251 hasRelatedWork W2038682279 @default.
- W2274895251 hasRelatedWork W2042905954 @default.
- W2274895251 hasRelatedWork W2043265050 @default.
- W2274895251 hasRelatedWork W2049711250 @default.
- W2274895251 hasRelatedWork W2065216900 @default.
- W2274895251 hasRelatedWork W2080273846 @default.
- W2274895251 hasRelatedWork W2081423814 @default.
- W2274895251 hasRelatedWork W2087293422 @default.
- W2274895251 hasRelatedWork W2087753975 @default.
- W2274895251 hasRelatedWork W2098883792 @default.
- W2274895251 hasRelatedWork W2120128049 @default.
- W2274895251 hasRelatedWork W2163415661 @default.
- W2274895251 hasRelatedWork W2405558454 @default.
- W2274895251 hasRelatedWork W1539740502 @default.
- W2274895251 isParatext "false" @default.
- W2274895251 isRetracted "false" @default.
- W2274895251 magId "2274895251" @default.
- W2274895251 workType "article" @default.