Matches in SemOpenAlex for { <https://semopenalex.org/work/W2275190268> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2275190268 endingPage "481" @default.
- W2275190268 startingPage "475" @default.
- W2275190268 abstract "Abstract The issues pertaining to non-uniform sputtering from polycrystalline grains in metal thin films during Secondary Ion Mass Spectrometer depth profiling process are investigated. A case study on Mo thin films obtained through magnetron sputter deposition at different substrate temperatures and possessing different microstructural features is presented. X-ray diffraction, scanning electron microscopy, Rutherford backscattering spectrometry and atomic force microscopy were used to elucidate and corroborate the experimental observations of diffusion like broadening observed in the SIMS profiles. While the interfacial diffusion is ruled out based on the inferences derived from complementary experimental investigations, the observed broadening could be attributed to the influence of microstructural features on the sputtering process." @default.
- W2275190268 created "2016-06-24" @default.
- W2275190268 creator A5012169743 @default.
- W2275190268 creator A5036962130 @default.
- W2275190268 creator A5053652815 @default.
- W2275190268 creator A5086150043 @default.
- W2275190268 date "2016-04-01" @default.
- W2275190268 modified "2023-09-22" @default.
- W2275190268 title "Secondary Ion Mass Spectrometry based depth profiling of Mo/Si interfaces with different microcrystalline structure" @default.
- W2275190268 cites W1963753955 @default.
- W2275190268 cites W1976562583 @default.
- W2275190268 cites W1978894902 @default.
- W2275190268 cites W1996732468 @default.
- W2275190268 cites W1997436133 @default.
- W2275190268 cites W2007756740 @default.
- W2275190268 cites W2009909649 @default.
- W2275190268 cites W2022953260 @default.
- W2275190268 cites W2035437021 @default.
- W2275190268 cites W2040516029 @default.
- W2275190268 cites W2047235515 @default.
- W2275190268 cites W2051194841 @default.
- W2275190268 cites W2055073304 @default.
- W2275190268 cites W2060092554 @default.
- W2275190268 cites W2069043502 @default.
- W2275190268 cites W2075622576 @default.
- W2275190268 cites W2079119675 @default.
- W2275190268 cites W2083343485 @default.
- W2275190268 cites W2091172952 @default.
- W2275190268 cites W2094499443 @default.
- W2275190268 cites W2094821484 @default.
- W2275190268 cites W2107784923 @default.
- W2275190268 cites W2133557978 @default.
- W2275190268 cites W2159791263 @default.
- W2275190268 cites W2180898129 @default.
- W2275190268 doi "https://doi.org/10.1016/j.matchemphys.2016.02.041" @default.
- W2275190268 hasPublicationYear "2016" @default.
- W2275190268 type Work @default.
- W2275190268 sameAs 2275190268 @default.
- W2275190268 citedByCount "5" @default.
- W2275190268 countsByYear W22751902682016 @default.
- W2275190268 countsByYear W22751902682018 @default.
- W2275190268 countsByYear W22751902682019 @default.
- W2275190268 countsByYear W22751902682020 @default.
- W2275190268 countsByYear W22751902682023 @default.
- W2275190268 crossrefType "journal-article" @default.
- W2275190268 hasAuthorship W2275190268A5012169743 @default.
- W2275190268 hasAuthorship W2275190268A5036962130 @default.
- W2275190268 hasAuthorship W2275190268A5053652815 @default.
- W2275190268 hasAuthorship W2275190268A5086150043 @default.
- W2275190268 hasConcept C107872376 @default.
- W2275190268 hasConcept C111919701 @default.
- W2275190268 hasConcept C113196181 @default.
- W2275190268 hasConcept C145148216 @default.
- W2275190268 hasConcept C162356407 @default.
- W2275190268 hasConcept C178790620 @default.
- W2275190268 hasConcept C185592680 @default.
- W2275190268 hasConcept C187191949 @default.
- W2275190268 hasConcept C192562407 @default.
- W2275190268 hasConcept C201370411 @default.
- W2275190268 hasConcept C41008148 @default.
- W2275190268 hasConcept C43617362 @default.
- W2275190268 hasConcept C77671233 @default.
- W2275190268 hasConcept C8010536 @default.
- W2275190268 hasConceptScore W2275190268C107872376 @default.
- W2275190268 hasConceptScore W2275190268C111919701 @default.
- W2275190268 hasConceptScore W2275190268C113196181 @default.
- W2275190268 hasConceptScore W2275190268C145148216 @default.
- W2275190268 hasConceptScore W2275190268C162356407 @default.
- W2275190268 hasConceptScore W2275190268C178790620 @default.
- W2275190268 hasConceptScore W2275190268C185592680 @default.
- W2275190268 hasConceptScore W2275190268C187191949 @default.
- W2275190268 hasConceptScore W2275190268C192562407 @default.
- W2275190268 hasConceptScore W2275190268C201370411 @default.
- W2275190268 hasConceptScore W2275190268C41008148 @default.
- W2275190268 hasConceptScore W2275190268C43617362 @default.
- W2275190268 hasConceptScore W2275190268C77671233 @default.
- W2275190268 hasConceptScore W2275190268C8010536 @default.
- W2275190268 hasLocation W22751902681 @default.
- W2275190268 hasOpenAccess W2275190268 @default.
- W2275190268 hasPrimaryLocation W22751902681 @default.
- W2275190268 hasRelatedWork W1966763793 @default.
- W2275190268 hasRelatedWork W1985292131 @default.
- W2275190268 hasRelatedWork W1999654176 @default.
- W2275190268 hasRelatedWork W2009094487 @default.
- W2275190268 hasRelatedWork W2013576002 @default.
- W2275190268 hasRelatedWork W2026642978 @default.
- W2275190268 hasRelatedWork W2110211062 @default.
- W2275190268 hasRelatedWork W2150392377 @default.
- W2275190268 hasRelatedWork W3047621352 @default.
- W2275190268 hasRelatedWork W4220916081 @default.
- W2275190268 hasVolume "173" @default.
- W2275190268 isParatext "false" @default.
- W2275190268 isRetracted "false" @default.
- W2275190268 magId "2275190268" @default.
- W2275190268 workType "article" @default.