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- W2276632592 abstract "This paper have several important aspects and techniques about thin film deposition process have been presented such as a brief overview of PVD process, types of PVD system that are thermal evaporation and sputtering, a brief overview of CVD process. The study and development of thin films via physical vapour deposition has played a significant role in the development of optical coatings, semiconductors, and solar cells. A detailed explanation of the development and operation as well as future improvements that were made." @default.
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- W2276632592 title "Deposition of Thin Films by Physical and Chemical Process" @default.
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