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- W2276869267 abstract "In this paper we describe the fabrication and evaluation of on-chip silicon-based gaspressure sensors. The sensor is fabricated using standard Integrated Circuit (IC)fabrication technology except the final etching to delineate cantilever beams. Thebeam which is the key element in the sensor system is driven to its resonant frequencyby the difference in thermal expansion between silicon and oxide. The outputdetection is done by utilising the piezoresistive effect in a polysilicon resistor definedon top of the oxide layer. It is found that the resonant frequency (fR)) varies linearlywith the gas pressure from 100 mmHg to about 500 mmH, thus it is possible forsystem to be used as a gas pressure sensor" @default.
- W2276869267 created "2016-06-24" @default.
- W2276869267 creator A5000738635 @default.
- W2276869267 date "1990-01-01" @default.
- W2276869267 modified "2023-09-23" @default.
- W2276869267 title "The fabrication and evaluation of on-chip gas pressure sensors" @default.
- W2276869267 hasPublicationYear "1990" @default.
- W2276869267 type Work @default.
- W2276869267 sameAs 2276869267 @default.
- W2276869267 citedByCount "0" @default.
- W2276869267 crossrefType "journal-article" @default.
- W2276869267 hasAuthorship W2276869267A5000738635 @default.
- W2276869267 hasConcept C100460472 @default.
- W2276869267 hasConcept C119599485 @default.
- W2276869267 hasConcept C127413603 @default.
- W2276869267 hasConcept C136525101 @default.
- W2276869267 hasConcept C137488568 @default.
- W2276869267 hasConcept C141354745 @default.
- W2276869267 hasConcept C142724271 @default.
- W2276869267 hasConcept C145667562 @default.
- W2276869267 hasConcept C159985019 @default.
- W2276869267 hasConcept C165005293 @default.
- W2276869267 hasConcept C165801399 @default.
- W2276869267 hasConcept C171250308 @default.
- W2276869267 hasConcept C192562407 @default.
- W2276869267 hasConcept C198490522 @default.
- W2276869267 hasConcept C204787440 @default.
- W2276869267 hasConcept C24326235 @default.
- W2276869267 hasConcept C2779227376 @default.
- W2276869267 hasConcept C37977207 @default.
- W2276869267 hasConcept C41325743 @default.
- W2276869267 hasConcept C49040817 @default.
- W2276869267 hasConcept C544956773 @default.
- W2276869267 hasConcept C71924100 @default.
- W2276869267 hasConcept C78519656 @default.
- W2276869267 hasConceptScore W2276869267C100460472 @default.
- W2276869267 hasConceptScore W2276869267C119599485 @default.
- W2276869267 hasConceptScore W2276869267C127413603 @default.
- W2276869267 hasConceptScore W2276869267C136525101 @default.
- W2276869267 hasConceptScore W2276869267C137488568 @default.
- W2276869267 hasConceptScore W2276869267C141354745 @default.
- W2276869267 hasConceptScore W2276869267C142724271 @default.
- W2276869267 hasConceptScore W2276869267C145667562 @default.
- W2276869267 hasConceptScore W2276869267C159985019 @default.
- W2276869267 hasConceptScore W2276869267C165005293 @default.
- W2276869267 hasConceptScore W2276869267C165801399 @default.
- W2276869267 hasConceptScore W2276869267C171250308 @default.
- W2276869267 hasConceptScore W2276869267C192562407 @default.
- W2276869267 hasConceptScore W2276869267C198490522 @default.
- W2276869267 hasConceptScore W2276869267C204787440 @default.
- W2276869267 hasConceptScore W2276869267C24326235 @default.
- W2276869267 hasConceptScore W2276869267C2779227376 @default.
- W2276869267 hasConceptScore W2276869267C37977207 @default.
- W2276869267 hasConceptScore W2276869267C41325743 @default.
- W2276869267 hasConceptScore W2276869267C49040817 @default.
- W2276869267 hasConceptScore W2276869267C544956773 @default.
- W2276869267 hasConceptScore W2276869267C71924100 @default.
- W2276869267 hasConceptScore W2276869267C78519656 @default.
- W2276869267 hasLocation W22768692671 @default.
- W2276869267 hasOpenAccess W2276869267 @default.
- W2276869267 hasPrimaryLocation W22768692671 @default.
- W2276869267 hasRelatedWork W1840820806 @default.
- W2276869267 hasRelatedWork W1970253663 @default.
- W2276869267 hasRelatedWork W1981236154 @default.
- W2276869267 hasRelatedWork W1990929141 @default.
- W2276869267 hasRelatedWork W1991709243 @default.
- W2276869267 hasRelatedWork W2004518031 @default.
- W2276869267 hasRelatedWork W2010917756 @default.
- W2276869267 hasRelatedWork W2061791472 @default.
- W2276869267 hasRelatedWork W2062488006 @default.
- W2276869267 hasRelatedWork W2123534011 @default.
- W2276869267 hasRelatedWork W2166721839 @default.
- W2276869267 hasRelatedWork W222657023 @default.
- W2276869267 hasRelatedWork W2542127090 @default.
- W2276869267 hasRelatedWork W2622730692 @default.
- W2276869267 hasRelatedWork W2886937089 @default.
- W2276869267 hasRelatedWork W2901033713 @default.
- W2276869267 hasRelatedWork W2995384007 @default.
- W2276869267 hasRelatedWork W788522720 @default.
- W2276869267 hasRelatedWork W829388182 @default.
- W2276869267 hasRelatedWork W2958681063 @default.
- W2276869267 isParatext "false" @default.
- W2276869267 isRetracted "false" @default.
- W2276869267 magId "2276869267" @default.
- W2276869267 workType "article" @default.