Matches in SemOpenAlex for { <https://semopenalex.org/work/W2277973310> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W2277973310 endingPage "247" @default.
- W2277973310 startingPage "243" @default.
- W2277973310 abstract "Si(Al)ON precursor was synthesized by formation of new Si-N bond using organoaluminum imine and liquid type poly(phenyl carbosilane). It was decomposed between 200 - 600℃, and the ceramic yield was 51% after pyrolysis. 150 ? 200 ㎚ in thickness of coating film was obtained by spin coating method. The precursor was easily oxidized during process because it was unstable in air. However the oxygen content was limited to 0.5 - 0.7 to silicon in heat treatment step. Even though the content of nitrogen was decreased by pyrolysis, Al-N and Si-N bonds were formed in ammonia atmosphere, and Si(Al)ON film was formed with 0.2 in content to silicon." @default.
- W2277973310 created "2016-06-24" @default.
- W2277973310 creator A5009813956 @default.
- W2277973310 creator A5028454610 @default.
- W2277973310 creator A5031934250 @default.
- W2277973310 creator A5048360549 @default.
- W2277973310 creator A5078809425 @default.
- W2277973310 date "2015-07-31" @default.
- W2277973310 modified "2023-10-18" @default.
- W2277973310 title "Preparation of Si(Al)ON Precursor Using Organoaluminum Imine and Poly (Phenyl Carbosilane), and the Compositional Change of the Film with Different Heat Treatment Condition" @default.
- W2277973310 cites W1965198006 @default.
- W2277973310 cites W1989625856 @default.
- W2277973310 cites W2008360993 @default.
- W2277973310 cites W2019154896 @default.
- W2277973310 cites W2019563618 @default.
- W2277973310 cites W2035119112 @default.
- W2277973310 cites W2036217756 @default.
- W2277973310 cites W2041672960 @default.
- W2277973310 cites W2044139137 @default.
- W2277973310 cites W2052919330 @default.
- W2277973310 cites W2071166670 @default.
- W2277973310 cites W2080369496 @default.
- W2277973310 cites W2085354072 @default.
- W2277973310 cites W2150886544 @default.
- W2277973310 cites W2170441077 @default.
- W2277973310 cites W2262769802 @default.
- W2277973310 cites W4255992979 @default.
- W2277973310 doi "https://doi.org/10.4191/kcers.2015.52.4.243" @default.
- W2277973310 hasPublicationYear "2015" @default.
- W2277973310 type Work @default.
- W2277973310 sameAs 2277973310 @default.
- W2277973310 citedByCount "1" @default.
- W2277973310 countsByYear W22779733102023 @default.
- W2277973310 crossrefType "journal-article" @default.
- W2277973310 hasAuthorship W2277973310A5009813956 @default.
- W2277973310 hasAuthorship W2277973310A5028454610 @default.
- W2277973310 hasAuthorship W2277973310A5031934250 @default.
- W2277973310 hasAuthorship W2277973310A5048360549 @default.
- W2277973310 hasAuthorship W2277973310A5078809425 @default.
- W2277973310 hasBestOaLocation W22779733101 @default.
- W2277973310 hasConcept C127413603 @default.
- W2277973310 hasConcept C161790260 @default.
- W2277973310 hasConcept C178790620 @default.
- W2277973310 hasConcept C185592680 @default.
- W2277973310 hasConcept C188027245 @default.
- W2277973310 hasConcept C192562407 @default.
- W2277973310 hasConcept C2776573223 @default.
- W2277973310 hasConcept C42360764 @default.
- W2277973310 hasConceptScore W2277973310C127413603 @default.
- W2277973310 hasConceptScore W2277973310C161790260 @default.
- W2277973310 hasConceptScore W2277973310C178790620 @default.
- W2277973310 hasConceptScore W2277973310C185592680 @default.
- W2277973310 hasConceptScore W2277973310C188027245 @default.
- W2277973310 hasConceptScore W2277973310C192562407 @default.
- W2277973310 hasConceptScore W2277973310C2776573223 @default.
- W2277973310 hasConceptScore W2277973310C42360764 @default.
- W2277973310 hasIssue "4" @default.
- W2277973310 hasLocation W22779733101 @default.
- W2277973310 hasOpenAccess W2277973310 @default.
- W2277973310 hasPrimaryLocation W22779733101 @default.
- W2277973310 hasRelatedWork W1995005782 @default.
- W2277973310 hasRelatedWork W2000213067 @default.
- W2277973310 hasRelatedWork W2010059724 @default.
- W2277973310 hasRelatedWork W2068476541 @default.
- W2277973310 hasRelatedWork W2091122622 @default.
- W2277973310 hasRelatedWork W2095492140 @default.
- W2277973310 hasRelatedWork W2890296789 @default.
- W2277973310 hasRelatedWork W2898359642 @default.
- W2277973310 hasRelatedWork W3014299944 @default.
- W2277973310 hasRelatedWork W4327761239 @default.
- W2277973310 hasVolume "52" @default.
- W2277973310 isParatext "false" @default.
- W2277973310 isRetracted "false" @default.
- W2277973310 magId "2277973310" @default.
- W2277973310 workType "article" @default.