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- W2278235512 abstract "Abstract. During recent years, many investigations have been carried out to determine how to selectdi erent materials for the making of Micro Electro Mechanical Systems (MEMS) and bio-MEMS. TheNiTi shape memory alloy thin lm has been much regarded as a promising candidate for MEMS due toits unique shape memory e ect and high energy output. In this research, NiTi thin lm was fabricatedusing a sputtering technique from separate elemental Ni and Ti targets. The characterizations of thedeposited lms were investigated using di erent analysis techniques, such as Field Emission SEM, DSC,XRD, electrical resistivity measurement and nanoindentation." @default.
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- W2278235512 date "2009-06-01" @default.
- W2278235512 modified "2023-09-27" @default.
- W2278235512 title "Characterization of Sputtered NiTi Shape Memory Alloy Thin Films" @default.
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