Matches in SemOpenAlex for { <https://semopenalex.org/work/W2278702467> ?p ?o ?g. }
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77
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- W2278702467 endingPage "20801" @default.
- W2278702467 startingPage "20801" @default.
- W2278702467 abstract "Dielectric barrier discharge (DBD) deposition of thin films is increasingly studied as a promising alternative to other non-thermal processes such as low-pressure plasma-enhanced chemical vapor deposition (PECVD) or wet-coating. In this paper we demonstrate how optimizing gas injection in the DBD results in an improvement in the reactor performance. We propose to confine the precursor gas close to the deposition substrate by an additional gas flow. The performance of this design is studied though simulation of mass transport. To optimize the deposited thickness, gas cost and reactor clogging, we assess the influence of the confinement, total gas flow rate and DBD length. The confinement is found to reduce reactor clogging, even for long DBD, and increase the deposit thickness. This increase in thickness requires a proportionate increase in the gas flow-rate, making the gas-cost the main limitation of the proposed design. We show, however, that by fine-tuning the operating conditions a beneficial compromise can be obtained between the three optimization objectives." @default.
- W2278702467 created "2016-06-24" @default.
- W2278702467 creator A5015360691 @default.
- W2278702467 creator A5024719103 @default.
- W2278702467 creator A5026207002 @default.
- W2278702467 creator A5087778180 @default.
- W2278702467 date "2016-02-01" @default.
- W2278702467 modified "2023-09-25" @default.
- W2278702467 title "DBD reactor design and optimization in continuous AP-PECVD from HMDSO/N2/N2O mixture" @default.
- W2278702467 cites W1965475311 @default.
- W2278702467 cites W1970596858 @default.
- W2278702467 cites W1979329887 @default.
- W2278702467 cites W1981343459 @default.
- W2278702467 cites W1985112930 @default.
- W2278702467 cites W2003399898 @default.
- W2278702467 cites W2018551187 @default.
- W2278702467 cites W2031346350 @default.
- W2278702467 cites W2034613884 @default.
- W2278702467 cites W2043539472 @default.
- W2278702467 cites W2044967390 @default.
- W2278702467 cites W2066800375 @default.
- W2278702467 cites W2078604865 @default.
- W2278702467 cites W2080582408 @default.
- W2278702467 cites W2085175903 @default.
- W2278702467 cites W2091160737 @default.
- W2278702467 cites W2092276082 @default.
- W2278702467 cites W2130754089 @default.
- W2278702467 cites W2140255855 @default.
- W2278702467 cites W2140553651 @default.
- W2278702467 cites W2153560899 @default.
- W2278702467 cites W2323197426 @default.
- W2278702467 doi "https://doi.org/10.1051/epjap/2016150525" @default.
- W2278702467 hasPublicationYear "2016" @default.
- W2278702467 type Work @default.
- W2278702467 sameAs 2278702467 @default.
- W2278702467 citedByCount "0" @default.
- W2278702467 crossrefType "journal-article" @default.
- W2278702467 hasAuthorship W2278702467A5015360691 @default.
- W2278702467 hasAuthorship W2278702467A5024719103 @default.
- W2278702467 hasAuthorship W2278702467A5026207002 @default.
- W2278702467 hasAuthorship W2278702467A5087778180 @default.
- W2278702467 hasConcept C127413603 @default.
- W2278702467 hasConcept C171250308 @default.
- W2278702467 hasConcept C185592680 @default.
- W2278702467 hasConcept C192562407 @default.
- W2278702467 hasConcept C38347018 @default.
- W2278702467 hasConcept C42360764 @default.
- W2278702467 hasConcept C57410435 @default.
- W2278702467 hasConceptScore W2278702467C127413603 @default.
- W2278702467 hasConceptScore W2278702467C171250308 @default.
- W2278702467 hasConceptScore W2278702467C185592680 @default.
- W2278702467 hasConceptScore W2278702467C192562407 @default.
- W2278702467 hasConceptScore W2278702467C38347018 @default.
- W2278702467 hasConceptScore W2278702467C42360764 @default.
- W2278702467 hasConceptScore W2278702467C57410435 @default.
- W2278702467 hasIssue "2" @default.
- W2278702467 hasLocation W22787024671 @default.
- W2278702467 hasLocation W22787024672 @default.
- W2278702467 hasOpenAccess W2278702467 @default.
- W2278702467 hasPrimaryLocation W22787024671 @default.
- W2278702467 hasRelatedWork W2002152537 @default.
- W2278702467 hasRelatedWork W2007639542 @default.
- W2278702467 hasRelatedWork W2042778921 @default.
- W2278702467 hasRelatedWork W2091737713 @default.
- W2278702467 hasRelatedWork W2748952813 @default.
- W2278702467 hasRelatedWork W2811058467 @default.
- W2278702467 hasRelatedWork W2899084033 @default.
- W2278702467 hasRelatedWork W3021283668 @default.
- W2278702467 hasRelatedWork W4282931204 @default.
- W2278702467 hasRelatedWork W4297186273 @default.
- W2278702467 hasVolume "73" @default.
- W2278702467 isParatext "false" @default.
- W2278702467 isRetracted "false" @default.
- W2278702467 magId "2278702467" @default.
- W2278702467 workType "article" @default.