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• W2279177356 abstract "In this paper an advanced numerical approach for the simulation of epitaxial growth in metalorganic chemical vapor deposition (MOCVD) reactors is presented. The mathematical model is based on the conservation equations for momentum and heat transfer combined with mass transfer" @default.
• W2279177356 created "2016-06-24" @default.
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• W2279177356 date "2002-01-01" @default.
• W2279177356 modified "2023-09-27" @default.
• W2279177356 title "3D Block-Structured Grid Algorithms for the Numerical Simulation of Chemical Vapor Deposition in Horizontal Reactors" @default.
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• W2279177356 doi "https://doi.org/10.1007/978-3-642-55919-8_30" @default.
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