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- W2281753237 abstract "The article includes the analysis of the features related to local doping of silicon using electrically active doping agents by thermomigration of binary and ternary liquid zones as compared to doping by diffusion. The concentration range of doping by binary zone migration is found to be substantially narrower than that of doping by diffusion. Introduction of a third component to the liquid phase ena-bles expansion of the thermomigration doping range to the values exceeding the diffusion doping range by the same doping agent. For silicon crystals, this technological feature of thermomigration is produced by using Ga x Al 1-x Si and Sn x Al 1-x Si ternary zones. The crystal doping rate by thermomigration in techno-logically relevant situations was shown to exceed the rate of diffusion doping by orders of magnitude. The layers doped by thermomigration of stably moving liquid zones are structurally more perfect than diffusion layers." @default.
- W2281753237 created "2016-06-24" @default.
- W2281753237 creator A5023292155 @default.
- W2281753237 creator A5038692554 @default.
- W2281753237 creator A5056862772 @default.
- W2281753237 date "2016-02-01" @default.
- W2281753237 modified "2023-09-23" @default.
- W2281753237 title "Local Doping of Semiconductor Crystals by Thermomigration" @default.
- W2281753237 doi "https://doi.org/10.4028/www.scientific.net/msf.843.46" @default.
- W2281753237 hasPublicationYear "2016" @default.
- W2281753237 type Work @default.
- W2281753237 sameAs 2281753237 @default.
- W2281753237 citedByCount "1" @default.
- W2281753237 countsByYear W22817532372021 @default.
- W2281753237 crossrefType "journal-article" @default.
- W2281753237 hasAuthorship W2281753237A5023292155 @default.
- W2281753237 hasAuthorship W2281753237A5038692554 @default.
- W2281753237 hasAuthorship W2281753237A5056862772 @default.
- W2281753237 hasConcept C108225325 @default.
- W2281753237 hasConcept C113196181 @default.
- W2281753237 hasConcept C121332964 @default.
- W2281753237 hasConcept C159985019 @default.
- W2281753237 hasConcept C185592680 @default.
- W2281753237 hasConcept C192562407 @default.
- W2281753237 hasConcept C199360897 @default.
- W2281753237 hasConcept C204323151 @default.
- W2281753237 hasConcept C26873012 @default.
- W2281753237 hasConcept C41008148 @default.
- W2281753237 hasConcept C43617362 @default.
- W2281753237 hasConcept C49040817 @default.
- W2281753237 hasConcept C544956773 @default.
- W2281753237 hasConcept C57863236 @default.
- W2281753237 hasConcept C64452783 @default.
- W2281753237 hasConcept C69357855 @default.
- W2281753237 hasConcept C97355855 @default.
- W2281753237 hasConceptScore W2281753237C108225325 @default.
- W2281753237 hasConceptScore W2281753237C113196181 @default.
- W2281753237 hasConceptScore W2281753237C121332964 @default.
- W2281753237 hasConceptScore W2281753237C159985019 @default.
- W2281753237 hasConceptScore W2281753237C185592680 @default.
- W2281753237 hasConceptScore W2281753237C192562407 @default.
- W2281753237 hasConceptScore W2281753237C199360897 @default.
- W2281753237 hasConceptScore W2281753237C204323151 @default.
- W2281753237 hasConceptScore W2281753237C26873012 @default.
- W2281753237 hasConceptScore W2281753237C41008148 @default.
- W2281753237 hasConceptScore W2281753237C43617362 @default.
- W2281753237 hasConceptScore W2281753237C49040817 @default.
- W2281753237 hasConceptScore W2281753237C544956773 @default.
- W2281753237 hasConceptScore W2281753237C57863236 @default.
- W2281753237 hasConceptScore W2281753237C64452783 @default.
- W2281753237 hasConceptScore W2281753237C69357855 @default.
- W2281753237 hasConceptScore W2281753237C97355855 @default.
- W2281753237 hasLocation W22817532371 @default.
- W2281753237 hasOpenAccess W2281753237 @default.
- W2281753237 hasPrimaryLocation W22817532371 @default.
- W2281753237 hasRelatedWork W13286082 @default.
- W2281753237 hasRelatedWork W18475140 @default.
- W2281753237 hasRelatedWork W20787237 @default.
- W2281753237 hasRelatedWork W25412200 @default.
- W2281753237 hasRelatedWork W27664357 @default.
- W2281753237 hasRelatedWork W29208188 @default.
- W2281753237 hasRelatedWork W33630165 @default.
- W2281753237 hasRelatedWork W42968457 @default.
- W2281753237 hasRelatedWork W47191903 @default.
- W2281753237 hasRelatedWork W8876354 @default.
- W2281753237 isParatext "false" @default.
- W2281753237 isRetracted "false" @default.
- W2281753237 magId "2281753237" @default.
- W2281753237 workType "article" @default.