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- W2284101282 abstract "Gas Flow Sputtering (GFS) belongs to the group of the Physical Vapour Deposition techniques (PVD) like Electron Beam Vapour Deposition and Magnetron Sputtering. The special characteristic of GFS is the additional gas inlet and gas flow respectively, which transports the sputtered material from the source to the substrate. Argon is used as working gas. In comparison to the other PVD-techniques GFS operates in a high pressure range from 0.3 to 0.7 mbar. Furthermore, the gas flow allows coating areas which are not in line-of-sight without an additional substrate movement.The work performed by GFS aims at the goal to coat simple planar geometries as well as complex parts and shapes with different materials, e.g. a turbine blade or the inside of a tube. The influence of different process parameters on the microstructure formation of sputtered Titanium-coatings is investigated, e.g. pressure, bias voltage and distance. Substrate geometry and position in the gas flow were varied as well. The analysis of the microstructure was executed by Scanning Electron Microscopy. The crystal structure of the coatings was examined by X-Ray Diffraction (XRD).The results show that only a bias voltage during coating process causes a striking change in microstructure. Their flake looking surface and their fine columnar structure have changed into a dense structure. XRD measurements confirmed this visual change. At all tests the hexagonal phase of pure titanium has occurred, but by the use of a bias voltage the strong texture of the phase has disappeared. The contrary effect could be demonstrated for the parameter substrate temperature. Pre-heating the substrate to a temperature at 0.3 T/Tm has amplified the texture. In contrast the parameters distance and pressure had no significant influence on the microstructure." @default.
- W2284101282 created "2016-06-24" @default.
- W2284101282 creator A5001550422 @default.
- W2284101282 creator A5026981147 @default.
- W2284101282 date "2008-09-04" @default.
- W2284101282 modified "2023-09-23" @default.
- W2284101282 title "Investigation of the Process Oriented Microstructure Formation of Gas Flow Sputtered Titanium Coatings" @default.
- W2284101282 hasPublicationYear "2008" @default.
- W2284101282 type Work @default.
- W2284101282 sameAs 2284101282 @default.
- W2284101282 citedByCount "0" @default.
- W2284101282 crossrefType "journal-article" @default.
- W2284101282 hasAuthorship W2284101282A5001550422 @default.
- W2284101282 hasAuthorship W2284101282A5026981147 @default.
- W2284101282 hasConcept C111368507 @default.
- W2284101282 hasConcept C115961682 @default.
- W2284101282 hasConcept C119599485 @default.
- W2284101282 hasConcept C127313418 @default.
- W2284101282 hasConcept C127413603 @default.
- W2284101282 hasConcept C154945302 @default.
- W2284101282 hasConcept C159985019 @default.
- W2284101282 hasConcept C165801399 @default.
- W2284101282 hasConcept C171250308 @default.
- W2284101282 hasConcept C19067145 @default.
- W2284101282 hasConcept C191897082 @default.
- W2284101282 hasConcept C192562407 @default.
- W2284101282 hasConcept C20254490 @default.
- W2284101282 hasConcept C22423302 @default.
- W2284101282 hasConcept C26771246 @default.
- W2284101282 hasConcept C2777289219 @default.
- W2284101282 hasConcept C2781195486 @default.
- W2284101282 hasConcept C2781448156 @default.
- W2284101282 hasConcept C41008148 @default.
- W2284101282 hasConcept C506065880 @default.
- W2284101282 hasConcept C51576277 @default.
- W2284101282 hasConcept C61427134 @default.
- W2284101282 hasConcept C87976508 @default.
- W2284101282 hasConceptScore W2284101282C111368507 @default.
- W2284101282 hasConceptScore W2284101282C115961682 @default.
- W2284101282 hasConceptScore W2284101282C119599485 @default.
- W2284101282 hasConceptScore W2284101282C127313418 @default.
- W2284101282 hasConceptScore W2284101282C127413603 @default.
- W2284101282 hasConceptScore W2284101282C154945302 @default.
- W2284101282 hasConceptScore W2284101282C159985019 @default.
- W2284101282 hasConceptScore W2284101282C165801399 @default.
- W2284101282 hasConceptScore W2284101282C171250308 @default.
- W2284101282 hasConceptScore W2284101282C19067145 @default.
- W2284101282 hasConceptScore W2284101282C191897082 @default.
- W2284101282 hasConceptScore W2284101282C192562407 @default.
- W2284101282 hasConceptScore W2284101282C20254490 @default.
- W2284101282 hasConceptScore W2284101282C22423302 @default.
- W2284101282 hasConceptScore W2284101282C26771246 @default.
- W2284101282 hasConceptScore W2284101282C2777289219 @default.
- W2284101282 hasConceptScore W2284101282C2781195486 @default.
- W2284101282 hasConceptScore W2284101282C2781448156 @default.
- W2284101282 hasConceptScore W2284101282C41008148 @default.
- W2284101282 hasConceptScore W2284101282C506065880 @default.
- W2284101282 hasConceptScore W2284101282C51576277 @default.
- W2284101282 hasConceptScore W2284101282C61427134 @default.
- W2284101282 hasConceptScore W2284101282C87976508 @default.
- W2284101282 hasLocation W22841012821 @default.
- W2284101282 hasOpenAccess W2284101282 @default.
- W2284101282 hasPrimaryLocation W22841012821 @default.
- W2284101282 hasRelatedWork W1536893308 @default.
- W2284101282 hasRelatedWork W1944154444 @default.
- W2284101282 hasRelatedWork W1968393757 @default.
- W2284101282 hasRelatedWork W1975874487 @default.
- W2284101282 hasRelatedWork W1992675385 @default.
- W2284101282 hasRelatedWork W1995408771 @default.
- W2284101282 hasRelatedWork W1999934956 @default.
- W2284101282 hasRelatedWork W2005216067 @default.
- W2284101282 hasRelatedWork W200836320 @default.
- W2284101282 hasRelatedWork W2024887198 @default.
- W2284101282 hasRelatedWork W2064924415 @default.
- W2284101282 hasRelatedWork W2078553613 @default.
- W2284101282 hasRelatedWork W2094090753 @default.
- W2284101282 hasRelatedWork W2139903483 @default.
- W2284101282 hasRelatedWork W2390770513 @default.
- W2284101282 hasRelatedWork W2616844917 @default.
- W2284101282 hasRelatedWork W2759936212 @default.
- W2284101282 hasRelatedWork W2805209789 @default.
- W2284101282 hasRelatedWork W2810957548 @default.
- W2284101282 hasRelatedWork W311654786 @default.
- W2284101282 isParatext "false" @default.
- W2284101282 isRetracted "false" @default.
- W2284101282 magId "2284101282" @default.
- W2284101282 workType "article" @default.