Matches in SemOpenAlex for { <https://semopenalex.org/work/W2288270977> ?p ?o ?g. }
- W2288270977 endingPage "139" @default.
- W2288270977 startingPage "69" @default.
- W2288270977 abstract "This chapter discusses electron physics in microfabrication. It emphasizes on the central role that the resist plays in deciding which approach becomes more economically viable. In this discussion, the description of the ideal “family” of resists required for lithographic work is given and the necessary specification of a resist in detail is outlined. An illustrative theoretical treatment of resist behavior is outlined. This emphasis on resist behavior is justified on the grounds that in this work area there is most scope for establishing the exact role to be played by fast, versatile scanning systems with the implicit capability of making localized corrections for distortion. The chapter examines the possibilities and complexities involved in X-ray lithography. The basic ideas underlying the approach are outlined and, subsequently, each component is examined in detail. Where possible, quantitative data pertinent to the optimization of the method are given, the critical elements are identified, and the experimental results are discussed." @default.
- W2288270977 created "2016-06-24" @default.
- W2288270977 creator A5086166780 @default.
- W2288270977 date "1980-01-01" @default.
- W2288270977 modified "2023-10-16" @default.
- W2288270977 title "Electron Physics in Device Microfabrication. II Electron Resists, X-Ray Lithography, and Electron Beam Lithography Update" @default.
- W2288270977 cites W1011617765 @default.
- W2288270977 cites W1013704482 @default.
- W2288270977 cites W1025158049 @default.
- W2288270977 cites W1663598806 @default.
- W2288270977 cites W1764517327 @default.
- W2288270977 cites W1972902645 @default.
- W2288270977 cites W1979304897 @default.
- W2288270977 cites W1982246464 @default.
- W2288270977 cites W1983959732 @default.
- W2288270977 cites W1984919318 @default.
- W2288270977 cites W1985537563 @default.
- W2288270977 cites W1985969300 @default.
- W2288270977 cites W1989671089 @default.
- W2288270977 cites W1993669335 @default.
- W2288270977 cites W1996900454 @default.
- W2288270977 cites W2000858817 @default.
- W2288270977 cites W2002428919 @default.
- W2288270977 cites W2002842375 @default.
- W2288270977 cites W2003754600 @default.
- W2288270977 cites W2008083022 @default.
- W2288270977 cites W2015760276 @default.
- W2288270977 cites W2022194814 @default.
- W2288270977 cites W2024411515 @default.
- W2288270977 cites W2027682502 @default.
- W2288270977 cites W2028727480 @default.
- W2288270977 cites W2028987083 @default.
- W2288270977 cites W2029567471 @default.
- W2288270977 cites W2029867592 @default.
- W2288270977 cites W2037713186 @default.
- W2288270977 cites W2041603941 @default.
- W2288270977 cites W2049644855 @default.
- W2288270977 cites W2053460627 @default.
- W2288270977 cites W2055730155 @default.
- W2288270977 cites W2056858819 @default.
- W2288270977 cites W2058314587 @default.
- W2288270977 cites W2058802162 @default.
- W2288270977 cites W2061644221 @default.
- W2288270977 cites W2064257493 @default.
- W2288270977 cites W2064405541 @default.
- W2288270977 cites W2070828953 @default.
- W2288270977 cites W2077511770 @default.
- W2288270977 cites W2078515690 @default.
- W2288270977 cites W2087093231 @default.
- W2288270977 cites W2089222147 @default.
- W2288270977 cites W2090933733 @default.
- W2288270977 cites W2091742452 @default.
- W2288270977 cites W2092543479 @default.
- W2288270977 cites W2093080633 @default.
- W2288270977 cites W2105077656 @default.
- W2288270977 cites W2109685326 @default.
- W2288270977 cites W2137111730 @default.
- W2288270977 cites W2137163737 @default.
- W2288270977 cites W2203407419 @default.
- W2288270977 cites W2246571141 @default.
- W2288270977 cites W2018939050 @default.
- W2288270977 doi "https://doi.org/10.1016/s0065-2539(08)60097-9" @default.
- W2288270977 hasPublicationYear "1980" @default.
- W2288270977 type Work @default.
- W2288270977 sameAs 2288270977 @default.
- W2288270977 citedByCount "7" @default.
- W2288270977 countsByYear W22882709772020 @default.
- W2288270977 countsByYear W22882709772021 @default.
- W2288270977 crossrefType "book-chapter" @default.
- W2288270977 hasAuthorship W2288270977A5086166780 @default.
- W2288270977 hasConcept C121332964 @default.
- W2288270977 hasConcept C136525101 @default.
- W2288270977 hasConcept C142724271 @default.
- W2288270977 hasConcept C147120987 @default.
- W2288270977 hasConcept C171250308 @default.
- W2288270977 hasConcept C192562407 @default.
- W2288270977 hasConcept C200274948 @default.
- W2288270977 hasConcept C204223013 @default.
- W2288270977 hasConcept C204787440 @default.
- W2288270977 hasConcept C2779227376 @default.
- W2288270977 hasConcept C41794268 @default.
- W2288270977 hasConcept C49040817 @default.
- W2288270977 hasConcept C527607 @default.
- W2288270977 hasConcept C53524968 @default.
- W2288270977 hasConcept C62520636 @default.
- W2288270977 hasConcept C71924100 @default.
- W2288270977 hasConceptScore W2288270977C121332964 @default.
- W2288270977 hasConceptScore W2288270977C136525101 @default.
- W2288270977 hasConceptScore W2288270977C142724271 @default.
- W2288270977 hasConceptScore W2288270977C147120987 @default.
- W2288270977 hasConceptScore W2288270977C171250308 @default.
- W2288270977 hasConceptScore W2288270977C192562407 @default.
- W2288270977 hasConceptScore W2288270977C200274948 @default.
- W2288270977 hasConceptScore W2288270977C204223013 @default.
- W2288270977 hasConceptScore W2288270977C204787440 @default.
- W2288270977 hasConceptScore W2288270977C2779227376 @default.
- W2288270977 hasConceptScore W2288270977C41794268 @default.
- W2288270977 hasConceptScore W2288270977C49040817 @default.