Matches in SemOpenAlex for { <https://semopenalex.org/work/W2288630136> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2288630136 abstract "To characterize electrically the effect of the Cu diffusion in TSVs, a new test pattern is proposed and its effectiveness is verified experimentally. The test pattern has a shallow n+ region formed in an n-well region butted to the TSV dielectric surrounding the TSV. Through the n+/n well region, we can measure the diode and gated diode currents, the charge pumping current, and C-V to accurately analyze the effect. Our approach is demonstrated to be very useful by investigating the Cu diffusion effect in samples with two different barrier metal thicknesses." @default.
- W2288630136 created "2016-06-24" @default.
- W2288630136 creator A5001439771 @default.
- W2288630136 creator A5021926248 @default.
- W2288630136 creator A5024627962 @default.
- W2288630136 creator A5041546586 @default.
- W2288630136 creator A5057864063 @default.
- W2288630136 creator A5059900261 @default.
- W2288630136 creator A5067751706 @default.
- W2288630136 creator A5074535076 @default.
- W2288630136 creator A5079966712 @default.
- W2288630136 date "2015-12-01" @default.
- W2288630136 modified "2023-10-17" @default.
- W2288630136 title "A novel method to characterize the effect from the diffusion of Cu in through silicon via (TSV)" @default.
- W2288630136 cites W1786877199 @default.
- W2288630136 cites W1847613005 @default.
- W2288630136 cites W2014754697 @default.
- W2288630136 cites W2081744307 @default.
- W2288630136 doi "https://doi.org/10.1109/iedm.2015.7409645" @default.
- W2288630136 hasPublicationYear "2015" @default.
- W2288630136 type Work @default.
- W2288630136 sameAs 2288630136 @default.
- W2288630136 citedByCount "3" @default.
- W2288630136 countsByYear W22886301362018 @default.
- W2288630136 countsByYear W22886301362019 @default.
- W2288630136 crossrefType "proceedings-article" @default.
- W2288630136 hasAuthorship W2288630136A5001439771 @default.
- W2288630136 hasAuthorship W2288630136A5021926248 @default.
- W2288630136 hasAuthorship W2288630136A5024627962 @default.
- W2288630136 hasAuthorship W2288630136A5041546586 @default.
- W2288630136 hasAuthorship W2288630136A5057864063 @default.
- W2288630136 hasAuthorship W2288630136A5059900261 @default.
- W2288630136 hasAuthorship W2288630136A5067751706 @default.
- W2288630136 hasAuthorship W2288630136A5074535076 @default.
- W2288630136 hasAuthorship W2288630136A5079966712 @default.
- W2288630136 hasConcept C119599485 @default.
- W2288630136 hasConcept C121332964 @default.
- W2288630136 hasConcept C127413603 @default.
- W2288630136 hasConcept C133386390 @default.
- W2288630136 hasConcept C148043351 @default.
- W2288630136 hasConcept C192562407 @default.
- W2288630136 hasConcept C24326235 @default.
- W2288630136 hasConcept C45632049 @default.
- W2288630136 hasConcept C49040817 @default.
- W2288630136 hasConcept C52236655 @default.
- W2288630136 hasConcept C544956773 @default.
- W2288630136 hasConcept C69357855 @default.
- W2288630136 hasConcept C78434282 @default.
- W2288630136 hasConcept C97355855 @default.
- W2288630136 hasConceptScore W2288630136C119599485 @default.
- W2288630136 hasConceptScore W2288630136C121332964 @default.
- W2288630136 hasConceptScore W2288630136C127413603 @default.
- W2288630136 hasConceptScore W2288630136C133386390 @default.
- W2288630136 hasConceptScore W2288630136C148043351 @default.
- W2288630136 hasConceptScore W2288630136C192562407 @default.
- W2288630136 hasConceptScore W2288630136C24326235 @default.
- W2288630136 hasConceptScore W2288630136C45632049 @default.
- W2288630136 hasConceptScore W2288630136C49040817 @default.
- W2288630136 hasConceptScore W2288630136C52236655 @default.
- W2288630136 hasConceptScore W2288630136C544956773 @default.
- W2288630136 hasConceptScore W2288630136C69357855 @default.
- W2288630136 hasConceptScore W2288630136C78434282 @default.
- W2288630136 hasConceptScore W2288630136C97355855 @default.
- W2288630136 hasLocation W22886301361 @default.
- W2288630136 hasOpenAccess W2288630136 @default.
- W2288630136 hasPrimaryLocation W22886301361 @default.
- W2288630136 hasRelatedWork W1579528056 @default.
- W2288630136 hasRelatedWork W2052239121 @default.
- W2288630136 hasRelatedWork W2061339686 @default.
- W2288630136 hasRelatedWork W2067989004 @default.
- W2288630136 hasRelatedWork W2098866392 @default.
- W2288630136 hasRelatedWork W2105441829 @default.
- W2288630136 hasRelatedWork W2110237089 @default.
- W2288630136 hasRelatedWork W2110909203 @default.
- W2288630136 hasRelatedWork W2131850288 @default.
- W2288630136 hasRelatedWork W2135072877 @default.
- W2288630136 hasRelatedWork W2150577742 @default.
- W2288630136 hasRelatedWork W2305731760 @default.
- W2288630136 hasRelatedWork W2537678688 @default.
- W2288630136 hasRelatedWork W2543315228 @default.
- W2288630136 hasRelatedWork W2548778543 @default.
- W2288630136 hasRelatedWork W2901298442 @default.
- W2288630136 hasRelatedWork W3082085141 @default.
- W2288630136 hasRelatedWork W3127562312 @default.
- W2288630136 hasRelatedWork W3147297448 @default.
- W2288630136 hasRelatedWork W635434182 @default.
- W2288630136 isParatext "false" @default.
- W2288630136 isRetracted "false" @default.
- W2288630136 magId "2288630136" @default.
- W2288630136 workType "article" @default.