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- W2291584037 abstract "During the past decade, portable electronic devices have become considerably more complex and have found many new challenges, especially in miniaturization. To effectively integrate battery technology in these applications, it is essential to produce high quality thin films for all-solid-state batteries. For this reason, conformal thin film deposition techniques, like atomic layer deposition (ALD), are gaining increasingly more interest." @default.
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- W2291584037 date "2010-01-01" @default.
- W2291584037 modified "2023-09-27" @default.
- W2291584037 title "Co3O4 as Anode Material for Thin Film μBatteries by Remote Plasma Atomic Layer Deposition" @default.
- W2291584037 doi "https://doi.org/10.1149/ma2010-03/1/252" @default.
- W2291584037 hasPublicationYear "2010" @default.
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