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- W2292913851 abstract "Large area uniform deposition of YBa{sub 2}Cu{sub 3}O{sub 7} (YBCO) thin films on 8 inch diameter wafers, using a 3 inch diameter sputtering target and optimized substrate rotation in a single target 90{degree} off-axis sputtering technique, is reported. The variation in thickness, composition and superconducting properties was studied as a function of substrate position on stationary and rotating substrates. The films deposited from a 3 in. target on rotating substrates displayed uniform thickness ( 88.3 K) over an 8 in. diameter area." @default.
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- W2292913851 date "1996-11-01" @default.
- W2292913851 modified "2023-09-23" @default.
- W2292913851 title "Large area uniform deposition of YBa{sub 2}Cu{sub 3}O{sub 7} thin films by a 90{degree} off-axis sputtering technique" @default.
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