Matches in SemOpenAlex for { <https://semopenalex.org/work/W2296968525> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W2296968525 abstract "We have been developing a hybrid 193 nm ArF laser system that consists of a solid state seeding laser and an ArF excimer laser amplifier for power-boosting. The solid state laser consists of an Yb-fiber-solid hybrid laser system and an Er-fiber laser system as fundamentals, and one LBO and three CLBO crystals for frequency conversion. In an ArF power amplifier, the seed laser passes through the ArF gain media three times, and an average power of 110 W is obtained. As a demonstration of the potential applications of the laser, an interference exposure test is performed." @default.
- W2296968525 created "2016-06-24" @default.
- W2296968525 creator A5000770396 @default.
- W2296968525 creator A5003129740 @default.
- W2296968525 creator A5003596492 @default.
- W2296968525 creator A5012704350 @default.
- W2296968525 creator A5017358159 @default.
- W2296968525 creator A5035581370 @default.
- W2296968525 creator A5045529295 @default.
- W2296968525 creator A5055009867 @default.
- W2296968525 creator A5056552692 @default.
- W2296968525 creator A5062262143 @default.
- W2296968525 creator A5074165869 @default.
- W2296968525 creator A5082150027 @default.
- W2296968525 creator A5084256351 @default.
- W2296968525 creator A5086497606 @default.
- W2296968525 creator A5088447846 @default.
- W2296968525 creator A5091004441 @default.
- W2296968525 date "2016-03-16" @default.
- W2296968525 modified "2023-10-02" @default.
- W2296968525 title "Development of high coherence high power 193nm laser" @default.
- W2296968525 cites W1974009826 @default.
- W2296968525 cites W1980457382 @default.
- W2296968525 cites W1994758824 @default.
- W2296968525 cites W2031955020 @default.
- W2296968525 cites W2230028354 @default.
- W2296968525 doi "https://doi.org/10.1117/12.2211210" @default.
- W2296968525 hasPublicationYear "2016" @default.
- W2296968525 type Work @default.
- W2296968525 sameAs 2296968525 @default.
- W2296968525 citedByCount "8" @default.
- W2296968525 countsByYear W22969685252017 @default.
- W2296968525 countsByYear W22969685252018 @default.
- W2296968525 countsByYear W22969685252019 @default.
- W2296968525 countsByYear W22969685252022 @default.
- W2296968525 crossrefType "proceedings-article" @default.
- W2296968525 hasAuthorship W2296968525A5000770396 @default.
- W2296968525 hasAuthorship W2296968525A5003129740 @default.
- W2296968525 hasAuthorship W2296968525A5003596492 @default.
- W2296968525 hasAuthorship W2296968525A5012704350 @default.
- W2296968525 hasAuthorship W2296968525A5017358159 @default.
- W2296968525 hasAuthorship W2296968525A5035581370 @default.
- W2296968525 hasAuthorship W2296968525A5045529295 @default.
- W2296968525 hasAuthorship W2296968525A5055009867 @default.
- W2296968525 hasAuthorship W2296968525A5056552692 @default.
- W2296968525 hasAuthorship W2296968525A5062262143 @default.
- W2296968525 hasAuthorship W2296968525A5074165869 @default.
- W2296968525 hasAuthorship W2296968525A5082150027 @default.
- W2296968525 hasAuthorship W2296968525A5084256351 @default.
- W2296968525 hasAuthorship W2296968525A5086497606 @default.
- W2296968525 hasAuthorship W2296968525A5088447846 @default.
- W2296968525 hasAuthorship W2296968525A5091004441 @default.
- W2296968525 hasConcept C120665830 @default.
- W2296968525 hasConcept C121332964 @default.
- W2296968525 hasConcept C163258240 @default.
- W2296968525 hasConcept C200649887 @default.
- W2296968525 hasConcept C2781181686 @default.
- W2296968525 hasConcept C41008148 @default.
- W2296968525 hasConcept C520434653 @default.
- W2296968525 hasConcept C62520636 @default.
- W2296968525 hasConceptScore W2296968525C120665830 @default.
- W2296968525 hasConceptScore W2296968525C121332964 @default.
- W2296968525 hasConceptScore W2296968525C163258240 @default.
- W2296968525 hasConceptScore W2296968525C200649887 @default.
- W2296968525 hasConceptScore W2296968525C2781181686 @default.
- W2296968525 hasConceptScore W2296968525C41008148 @default.
- W2296968525 hasConceptScore W2296968525C520434653 @default.
- W2296968525 hasConceptScore W2296968525C62520636 @default.
- W2296968525 hasLocation W22969685251 @default.
- W2296968525 hasOpenAccess W2296968525 @default.
- W2296968525 hasPrimaryLocation W22969685251 @default.
- W2296968525 hasRelatedWork W1975033863 @default.
- W2296968525 hasRelatedWork W1983066467 @default.
- W2296968525 hasRelatedWork W2020629594 @default.
- W2296968525 hasRelatedWork W2024393986 @default.
- W2296968525 hasRelatedWork W2355903712 @default.
- W2296968525 hasRelatedWork W2369443043 @default.
- W2296968525 hasRelatedWork W2387401754 @default.
- W2296968525 hasRelatedWork W4321519197 @default.
- W2296968525 hasRelatedWork W83936021 @default.
- W2296968525 hasRelatedWork W1964310330 @default.
- W2296968525 isParatext "false" @default.
- W2296968525 isRetracted "false" @default.
- W2296968525 magId "2296968525" @default.
- W2296968525 workType "article" @default.