Matches in SemOpenAlex for { <https://semopenalex.org/work/W2300573043> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2300573043 abstract "Modern optical applications have special demands on the lithographic fabrication technologies. This relates to the lateral shape of the structures as well as to their three dimensional surface profile. On the other hand optical nano-structures are often periodic which allows for the use of dedicated lithographic exposure principles. The paper briefly reviews actual developments in the field of optical nano-structure generation. Special emphasis will be given to two technologies: electron-beam lithography based on a flexible cell-projection method and the actual developments in diffractive mask aligner lithography. Both offer a cost effective fabrication alternative for high resolution structures or three-dimensional optical surface profiles." @default.
- W2300573043 created "2016-06-24" @default.
- W2300573043 creator A5007755364 @default.
- W2300573043 creator A5013918688 @default.
- W2300573043 creator A5038511413 @default.
- W2300573043 creator A5043801104 @default.
- W2300573043 date "2016-03-15" @default.
- W2300573043 modified "2023-09-23" @default.
- W2300573043 title "Alternative high-resolution lithographic technologies for optical applications" @default.
- W2300573043 cites W2062623692 @default.
- W2300573043 cites W2080722734 @default.
- W2300573043 cites W2091605695 @default.
- W2300573043 cites W2093186187 @default.
- W2300573043 cites W2328046938 @default.
- W2300573043 doi "https://doi.org/10.1117/12.2222028" @default.
- W2300573043 hasPublicationYear "2016" @default.
- W2300573043 type Work @default.
- W2300573043 sameAs 2300573043 @default.
- W2300573043 citedByCount "0" @default.
- W2300573043 crossrefType "proceedings-article" @default.
- W2300573043 hasAuthorship W2300573043A5007755364 @default.
- W2300573043 hasAuthorship W2300573043A5013918688 @default.
- W2300573043 hasAuthorship W2300573043A5038511413 @default.
- W2300573043 hasAuthorship W2300573043A5043801104 @default.
- W2300573043 hasConcept C105487726 @default.
- W2300573043 hasConcept C120665830 @default.
- W2300573043 hasConcept C121332964 @default.
- W2300573043 hasConcept C136525101 @default.
- W2300573043 hasConcept C142724271 @default.
- W2300573043 hasConcept C162996421 @default.
- W2300573043 hasConcept C163581340 @default.
- W2300573043 hasConcept C171250308 @default.
- W2300573043 hasConcept C182873914 @default.
- W2300573043 hasConcept C192562407 @default.
- W2300573043 hasConcept C200274948 @default.
- W2300573043 hasConcept C204223013 @default.
- W2300573043 hasConcept C204787440 @default.
- W2300573043 hasConcept C2779227376 @default.
- W2300573043 hasConcept C41008148 @default.
- W2300573043 hasConcept C41794268 @default.
- W2300573043 hasConcept C49040817 @default.
- W2300573043 hasConcept C53524968 @default.
- W2300573043 hasConcept C71924100 @default.
- W2300573043 hasConceptScore W2300573043C105487726 @default.
- W2300573043 hasConceptScore W2300573043C120665830 @default.
- W2300573043 hasConceptScore W2300573043C121332964 @default.
- W2300573043 hasConceptScore W2300573043C136525101 @default.
- W2300573043 hasConceptScore W2300573043C142724271 @default.
- W2300573043 hasConceptScore W2300573043C162996421 @default.
- W2300573043 hasConceptScore W2300573043C163581340 @default.
- W2300573043 hasConceptScore W2300573043C171250308 @default.
- W2300573043 hasConceptScore W2300573043C182873914 @default.
- W2300573043 hasConceptScore W2300573043C192562407 @default.
- W2300573043 hasConceptScore W2300573043C200274948 @default.
- W2300573043 hasConceptScore W2300573043C204223013 @default.
- W2300573043 hasConceptScore W2300573043C204787440 @default.
- W2300573043 hasConceptScore W2300573043C2779227376 @default.
- W2300573043 hasConceptScore W2300573043C41008148 @default.
- W2300573043 hasConceptScore W2300573043C41794268 @default.
- W2300573043 hasConceptScore W2300573043C49040817 @default.
- W2300573043 hasConceptScore W2300573043C53524968 @default.
- W2300573043 hasConceptScore W2300573043C71924100 @default.
- W2300573043 hasLocation W23005730431 @default.
- W2300573043 hasOpenAccess W2300573043 @default.
- W2300573043 hasPrimaryLocation W23005730431 @default.
- W2300573043 hasRelatedWork W1056900014 @default.
- W2300573043 hasRelatedWork W139951267 @default.
- W2300573043 hasRelatedWork W1417478003 @default.
- W2300573043 hasRelatedWork W1979309777 @default.
- W2300573043 hasRelatedWork W1986935404 @default.
- W2300573043 hasRelatedWork W1990939578 @default.
- W2300573043 hasRelatedWork W2018183265 @default.
- W2300573043 hasRelatedWork W2019961429 @default.
- W2300573043 hasRelatedWork W2023979620 @default.
- W2300573043 hasRelatedWork W2036933752 @default.
- W2300573043 hasRelatedWork W2066708269 @default.
- W2300573043 hasRelatedWork W2097387209 @default.
- W2300573043 hasRelatedWork W2129216969 @default.
- W2300573043 hasRelatedWork W2136513381 @default.
- W2300573043 hasRelatedWork W2164430714 @default.
- W2300573043 hasRelatedWork W2188327119 @default.
- W2300573043 hasRelatedWork W2328746449 @default.
- W2300573043 hasRelatedWork W2330766586 @default.
- W2300573043 hasRelatedWork W3213728446 @default.
- W2300573043 hasRelatedWork W69224963 @default.
- W2300573043 isParatext "false" @default.
- W2300573043 isRetracted "false" @default.
- W2300573043 magId "2300573043" @default.
- W2300573043 workType "article" @default.