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• W2300912488 abstract "This work presents an integrated closed-loop driving circuit for previously reported PZT resonant micro-mirrors, which is based on embedded capacitive position sensors for minimizing the system footprint. Signals with a high SNR of 84 dB were measured, when the mechanical scan angle of the micro-mirror was 2◦, so that high controlling resolution of 14 bit for the complete motion range of the mirror is enabled. The total power consumption of the closed-loop system is only 0.86mW. Measurement results of the closed-loop driven micromirror system are presented, demonstrating its competitiveness due to the great reliability, high precision and low-power consumption. Additionally, the implementation and performance of a self-resonant loop is discussed. Finally, the fabrication, temperature dependency and performance of embedded capacitive position sensors for single and dual axis PZT resonant micro-mirrors is evaluated and presented." @default.
• W2300912488 created "2016-06-24" @default.
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• W2300912488 date "2016-03-15" @default.
• W2300912488 modified "2023-09-23" @default.
• W2300912488 title "Low power and highly precise closed-loop driving circuits for piezoelectric micromirrors with embedded capacitive position sensors" @default.
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• W2300912488 doi "https://doi.org/10.1117/12.2209573" @default.
• W2300912488 hasPublicationYear "2016" @default.
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