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- W2301009489 abstract "A new method for extracting source/drain series resistances (Rsd) by combining split-CV and IV data of MOSFETs with multiple halo implant doses (called Multi-Dose Method) is proposed for the first time. This method eliminates the sensitivity of Rsd on effective channel length and considers halo-induced channel resistance increasing. Calibrated TCAD simulation and experimental data of 28-nm bulk MOSFETs with high-κ dielectric and metal gates are presented to support and validate the method. The maximum error of this method is within 5%, as compared with 63% for traditional methods. This method has been used as a monitor during technology optimization in foundry." @default.
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- W2301009489 date "2016-01-01" @default.
- W2301009489 modified "2023-10-17" @default.
- W2301009489 title "A new Multi-Dose Method for extracting source/drain series resistances of halo-doped MOSFETs" @default.
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