FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2301473075> ?p ?o ?g. }

• W2301473075 abstract "We report a new approach in fabricating a self-aligned gate GaN MOSFET. The fabrication technique is based on a double-layer photoresist (PR) and low-temperature-Ohmic formation process assisted by an inductively coupled plasma (ICP) dry etching process. In this process, the active region was automatically defined by the combination of a subsequently developed positive PR and the existing negative PR pattern. The Al Ohmic electrodes on the ICP-treated active region were formed by a lift-off process followed by 500 °C N2 1 min annealing. The specific contact resistance of 4.8 × 10−6 Ω cm2 was obtained in this process. Operation up to a gate bias of 30 V was confirmed. The maximum output current of 98 mA mm−1 and field-effect mobility of 110 cm2 V−1 s−1 were observed in the device with a gate length of 4 μm. Some non-ideal effects in this device, including the negative threshold voltage, larger off-state leakage and unsaturated on-state drain current, were also observed and analyzed. Some possible ways to improve the performance of the device were proposed." @default.
• W2301473075 created "2016-06-24" @default.
• W2301473075 creator A5010795996 @default.
• W2301473075 creator A5019096993 @default.
• W2301473075 creator A5020285133 @default.
• W2301473075 creator A5036467214 @default.
• W2301473075 creator A5038242619 @default.
• W2301473075 creator A5040254869 @default.
• W2301473075 creator A5051366494 @default.
• W2301473075 date "2015-06-09" @default.
• W2301473075 modified "2023-09-27" @default.
• W2301473075 title "A self-aligned gate GaN MOSFET using an ICP-assisted low-temperature Ohmic process" @default.
• W2301473075 cites W1985665529 @default.
• W2301473075 cites W2033475858 @default.
• W2301473075 cites W2037080325 @default.
• W2301473075 cites W2046690074 @default.
• W2301473075 cites W2070016496 @default.
• W2301473075 cites W2074461935 @default.
• W2301473075 cites W2097023036 @default.
• W2301473075 cites W2125128373 @default.
• W2301473075 doi "https://doi.org/10.1088/0268-1242/30/7/075003" @default.
• W2301473075 hasPublicationYear "2015" @default.
• W2301473075 type Work @default.
• W2301473075 sameAs 2301473075 @default.
• W2301473075 citedByCount "0" @default.
• W2301473075 crossrefType "journal-article" @default.
• W2301473075 hasAuthorship W2301473075A5010795996 @default.
• W2301473075 hasAuthorship W2301473075A5019096993 @default.
• W2301473075 hasAuthorship W2301473075A5020285133 @default.
• W2301473075 hasAuthorship W2301473075A5036467214 @default.
• W2301473075 hasAuthorship W2301473075A5038242619 @default.
• W2301473075 hasAuthorship W2301473075A5040254869 @default.
• W2301473075 hasAuthorship W2301473075A5051366494 @default.
• W2301473075 hasConcept C100460472 @default.
• W2301473075 hasConcept C113196181 @default.
• W2301473075 hasConcept C119599485 @default.
• W2301473075 hasConcept C121332964 @default.
• W2301473075 hasConcept C127413603 @default.
• W2301473075 hasConcept C1291036 @default.
• W2301473075 hasConcept C136525101 @default.
• W2301473075 hasConcept C138230450 @default.
• W2301473075 hasConcept C142724271 @default.
• W2301473075 hasConcept C147789679 @default.
• W2301473075 hasConcept C165801399 @default.
• W2301473075 hasConcept C171250308 @default.
• W2301473075 hasConcept C172385210 @default.
• W2301473075 hasConcept C17525397 @default.
• W2301473075 hasConcept C185592680 @default.
• W2301473075 hasConcept C191897082 @default.
• W2301473075 hasConcept C192562407 @default.
• W2301473075 hasConcept C204787440 @default.
• W2301473075 hasConcept C2361726 @default.
• W2301473075 hasConcept C2777855556 @default.
• W2301473075 hasConcept C2778413303 @default.
• W2301473075 hasConcept C2779227376 @default.
• W2301473075 hasConcept C43617362 @default.
• W2301473075 hasConcept C49040817 @default.
• W2301473075 hasConcept C62520636 @default.
• W2301473075 hasConcept C71924100 @default.
• W2301473075 hasConcept C82706917 @default.
• W2301473075 hasConcept C95974651 @default.
• W2301473075 hasConceptScore W2301473075C100460472 @default.
• W2301473075 hasConceptScore W2301473075C113196181 @default.
• W2301473075 hasConceptScore W2301473075C119599485 @default.
• W2301473075 hasConceptScore W2301473075C121332964 @default.
• W2301473075 hasConceptScore W2301473075C127413603 @default.
• W2301473075 hasConceptScore W2301473075C1291036 @default.
• W2301473075 hasConceptScore W2301473075C136525101 @default.
• W2301473075 hasConceptScore W2301473075C138230450 @default.
• W2301473075 hasConceptScore W2301473075C142724271 @default.
• W2301473075 hasConceptScore W2301473075C147789679 @default.
• W2301473075 hasConceptScore W2301473075C165801399 @default.
• W2301473075 hasConceptScore W2301473075C171250308 @default.
• W2301473075 hasConceptScore W2301473075C172385210 @default.
• W2301473075 hasConceptScore W2301473075C17525397 @default.
• W2301473075 hasConceptScore W2301473075C185592680 @default.
• W2301473075 hasConceptScore W2301473075C191897082 @default.
• W2301473075 hasConceptScore W2301473075C192562407 @default.
• W2301473075 hasConceptScore W2301473075C204787440 @default.
• W2301473075 hasConceptScore W2301473075C2361726 @default.
• W2301473075 hasConceptScore W2301473075C2777855556 @default.
• W2301473075 hasConceptScore W2301473075C2778413303 @default.
• W2301473075 hasConceptScore W2301473075C2779227376 @default.
• W2301473075 hasConceptScore W2301473075C43617362 @default.
• W2301473075 hasConceptScore W2301473075C49040817 @default.
• W2301473075 hasConceptScore W2301473075C62520636 @default.
• W2301473075 hasConceptScore W2301473075C71924100 @default.
• W2301473075 hasConceptScore W2301473075C82706917 @default.
• W2301473075 hasConceptScore W2301473075C95974651 @default.
• W2301473075 hasLocation W23014730751 @default.
• W2301473075 hasOpenAccess W2301473075 @default.
• W2301473075 hasPrimaryLocation W23014730751 @default.
• W2301473075 hasRelatedWork W176353885 @default.
• W2301473075 hasRelatedWork W1968884957 @default.
• W2301473075 hasRelatedWork W1990263730 @default.
• W2301473075 hasRelatedWork W2010739075 @default.
• W2301473075 hasRelatedWork W2029141984 @default.
• W2301473075 hasRelatedWork W2033081034 @default.
• W2301473075 hasRelatedWork W2046834129 @default.
• W2301473075 hasRelatedWork W2057796756 @default.

• next