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- W2301621004 abstract "High-precision ellipsoidal mirrors, which can efficiently focus X-rays to the nanometer dimension with a mirror, have not been realized because of the difficulties in the fabrication process. The purpose of our study was to develop nano-focusing ellipsoidal mirrors in the hard X-ray region. We developed a wave-optical focusing simulator for investigating alignment tolerances in nano-focusing with a designed ellipsoidal mirror, which produce a diffraction-limited focus size of 30 × 35 nm2 in full width at half maximum at an X-ray energy of 7 keV. The simulator can calculate focusing intensity distributions around the focal point under conditions of misalignment. The wave-optical simulator enabled the calculation of interference intensity distributions, which cannot be predicted by the conventional ray-trace method. The alignment conditions with a focal length error of ≲ ±10 µm, incident angle error of ≲ ±0.5 µrad, and in-plane rotation angle error of ≲ ±0.25 µrad must be satisfied for nano-focusing." @default.
- W2301621004 created "2016-06-24" @default.
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- W2301621004 date "2016-01-01" @default.
- W2301621004 modified "2023-10-12" @default.
- W2301621004 title "Wave-optical assessment of alignment tolerances in nano-focusing with ellipsoidal mirror" @default.
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- W2301621004 doi "https://doi.org/10.1063/1.4937527" @default.
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